EXTREME ULTRAVIOLET (EUV) MASK STACK PROCESSING
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Year of Publication 26.12.2019
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Year of Publication 26.12.2019
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MULTIPLE PATTERNING SCHEME INTEGRATION WITH PLANARIZED CUT PATTERNING
Xu, Yongan, Clevenger, Lawrence A, Chen, Hsueh-Chung, Mignot, Yann, Peethala, Cornelius Brown
Year of Publication 12.12.2019
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Year of Publication 12.12.2019
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Hard masks for block patterning
Xu, Yongan, Seshadri, Indira P. V, De Silva, Ekmini A, Estrada-Raygoza, Isabel C, Mignot, Yann A. M
Year of Publication 16.07.2019
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Year of Publication 16.07.2019
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Selective gas etching for self-aligned pattern transfer
Xu, Yongan, Arnold, John Christopher, Burns, Sean D, Mignot, Yann Alain Marcel
Year of Publication 24.07.2018
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Year of Publication 24.07.2018
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Integration of super via structure in BEOL
Xu, Yongan, Shobha, Hosadurga, Wang, Junli, Lee, Joe, Mignot, Yann, Bao, Ruqiang
Year of Publication 10.07.2018
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Year of Publication 10.07.2018
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Integration of super via structure in BEOL
Xu, Yongan, Shobha, Hosadurga, Wang, Junli, Lee, Joe, Mignot, Yann, Bao, Ruqiang
Year of Publication 10.07.2018
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Year of Publication 10.07.2018
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Hard masks for block patterning
Xu, Yongan, Seshadri, Indira P. V, De Silva, Ekmini A, Estrada-Raygoza, Isabel C, Mignot, Yann A. M
Year of Publication 02.10.2018
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Year of Publication 02.10.2018
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