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Year of Publication 02.11.2023
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GRADIENT OXIDATION AND ETCH FOR PVD METAL AS BOTTOM LINER IN BOTTOM UP GAP FILL
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Year of Publication 26.10.2023
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Year of Publication 26.10.2023
Patent
Gradient oxidation and etch for PVD metal as bottom liner in bottom up gap fill
HSU, CHIH-HSUN, CHEN, SHIHUNG, QI, ZHI-MIN, YANG, YI-XIONG, WANG, CHUNIEH, LEI, WEI, LAKSHMANAN, ANNAMALAI, WU, MENG-SHAN, ZHANG, JIE, ZHANG, AI-XI, TANG, XIANMIN, LU, JIANG, YANG, TSUNG-HAN, YUE, SHI-YU, WU, LIQI, LEI, YU, XU, YI, XIONG, ZIYE, WANG, RONG-JUN
Year of Publication 16.02.2024
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Year of Publication 16.02.2024
Patent