Design and Fabrication of a Slanted-Beam MEMS Accelerometer
Xu, Wei, Yang, Jie, Xie, Guofen, Wang, Bin, Qu, Mingshan, Wang, Xuguang, Liu, Xianxue, Tang, Bin
Published in Micromachines (Basel) (07.03.2017)
Published in Micromachines (Basel) (07.03.2017)
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Journal Article
Investigation of air damping effect in two kinds of capacitive MEMS accelerometers
Mo, Yuming, Zhou, Hao, Xie, Guofen, Tang, Bin
Published in Microsystem technologies : sensors, actuators, systems integration (01.04.2018)
Published in Microsystem technologies : sensors, actuators, systems integration (01.04.2018)
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Journal Article
Process development of an all-silicon capacitive accelerometer with a highly symmetrical spring-mass structure etched in TMAH+Triton-X-100
Tang, Bin, Sato, Kazuo, Xi, Shiwei, Xie, Guofen, Zhang, De, Cheng, Yongsheng
Published in Sensors and actuators. A. Physical. (15.09.2014)
Published in Sensors and actuators. A. Physical. (15.09.2014)
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Journal Article
Fabrication of a symmetrical accelerometer structure
Bin Tang, Sato, Kazuo, Shiwei Xi, Guofen Xie, Mingqiu Yao, Wei Su, De Zhang, Yongsheng Cheng
Published in 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (01.04.2014)
Published in 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) (01.04.2014)
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Conference Proceeding
MEMS closed-loop micro-accelerometer capable of adaptively adjusting balance position
LIU XIANXUE, LIU MENG, ZHAO BAOLIN, CHEN JUN, XIE GUOFEN, HUANG JIANSHU
Year of Publication 21.03.2023
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Year of Publication 21.03.2023
Patent
Quartz micro-accelerometer
ZHAO BAOLIN, WANG JIE, WANG XUGUANG, XIE JIN, SHEN CHAOYANG, XIONG ZHUANG, XIE GUOFEN, WANG BIN, QU MINGSHAN, ZHANG ZHAOYUN, CHEN JUN, YANG JIE, LIU ZHENHUA, HUANG JIANSHU
Year of Publication 01.08.2023
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Year of Publication 01.08.2023
Patent
Piezoelectric vibration excitation self-diagnosis MEMS (Micro Electro Mechanical System) accelerometer core and accelerometer
LIU XIANXUE, GU HAOYU, ZHAO BAOLIN, ZHOU HAO, TANG BIN, YANG JIE, XIE GUOFEN
Year of Publication 06.11.2018
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Year of Publication 06.11.2018
Patent
Three-axis capacitance type micro-accelerometer
LIU XIANXUE, PENG BO, ZHANG ZHAOYUN, SU WEI, DU LIANMING, XIONG ZHUANG, XU WEI, TANG BIN, XIE GUOFEN
Year of Publication 03.12.2019
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Year of Publication 03.12.2019
Patent