A Novel Model of the H Radical in Hot-Filament Chemical Vapor Deposition
Guo, Xiao-Song (小松 郭), Bao, Zhong (忠包), Zhang, Shan-Shan (山山 章), Xie, Er-Qing (二庆 谢)
Published in Chinese physics letters (01.02.2011)
Published in Chinese physics letters (01.02.2011)
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Journal Article
Effect of Substrate Temperature on the Structural, Electrical and Optical Properties of Nanocrystalline Silicon Films in Hot-Filament Chemical Vapor Deposition
Guo, Xiao-Song (小松 郭), Zhang, Shan-Shan (山山 章), Bao, Zhong (忠包), Zhang, Hong-Liang (洪亮 张), Chen, Chang-Cheng (长城 陈), Liu, Li-Xin (立新 刘), Liu, Yan-Xia (延霞 刘), Xie, Er-Qing (二庆 谢)
Published in Chinese physics letters (01.02.2011)
Published in Chinese physics letters (01.02.2011)
Get full text
Journal Article