PLASMA ETCHING SYSTEM
CHENG, Shiran, XU, Kaidong, GUO, Song, HU, Dongdong, LI, Na, LIU, Haiyang, WU, Zhihao, LIU, Xiaobo
Year of Publication 06.10.2022
Get full text
Year of Publication 06.10.2022
Patent
ROTATABLE FARADAY CLEANING APPARATUS AND PLASMA PROCESSING SYSTEM
CHENG, Shiran, XU, Kaidong, GUO, Song, HU, Dongdong, LI, Na, LIU, Haiyang, WU, Zhihao, LIU, Xiaobo
Year of Publication 22.09.2022
Get full text
Year of Publication 22.09.2022
Patent
DEVICE FOR BLOCKING PLASMA BACKFLOW IN PROCESS CHAMBER TO PROTECT AIR INLET STRUCTURE
CHENG, Shiran, XU, Kaidong, GUO, Song, LI, Na, HU, Dongdong, LIU, Haiyang, WU, Zhihao, LIU, Xiaobo
Year of Publication 11.08.2022
Get full text
Year of Publication 11.08.2022
Patent
INDUCTIVELY COUPLED PLASMA TREATMENT SYSTEM
CHENG, Shiran, XU, Kaidong, GUO, Song, LI, Xuedong, LI, Na, HU, Dongdong, LIU, Haiyang, LIU, Xiaobo
Year of Publication 11.08.2022
Get full text
Year of Publication 11.08.2022
Patent
CERAMIC AIR INLET RADIO FREQUENCY CONNECTION TYPE CLEANING DEVICE
CHENG, Shiran, ZHANG, Jun, XU, Kaidong, HU, Dongdong, LI, Xuedong, LI, Na, LIU, Haiyang, WU, Zhihao
Year of Publication 11.08.2022
Get full text
Year of Publication 11.08.2022
Patent
PREPARATION METHOD OF NOVEL CONIP CLUSTER DISPERSION MODIFIED PHOTOCATALYST
LI Taifeng, ZHU Ying, LI Xinyu, YOU Peibo, TENG Weili, FAN Hua, WANG Jing, WU Wanying, YANG Yilong, ZHANG Haiyang, LIU Xiaoyan, ZHANG Zhiyuan, XU Kaidong, LI Peng, YANG Qingjie
Year of Publication 26.04.2023
Get full text
Year of Publication 26.04.2023
Patent