Method for dry etching of lithium niobate
PENG TAIYAN, XU KAIDONG, LIU JIAN, FENG YINGXIONG, CHE DONGCHEN, DAI HAICHENG
Year of Publication 23.12.2022
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Year of Publication 23.12.2022
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Regulator and semiconductor processing equipment
ZHU XIAOQING, ZHU DELIAN, LIU LEI, LU HAO, XU KAIDONG, ZHUANG JIAWEI, GUO SONG, QIAN JUN
Year of Publication 10.11.2023
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Year of Publication 10.11.2023
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Lifting device for cavity cover of vacuum transmission chamber
ZHU XIAOQING, XU KAIDONG, LU XINYU, FANG CHUANYANG, LYU KANGLI, HU DONGDONG
Year of Publication 07.11.2023
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Year of Publication 07.11.2023
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Wafer stage device
LIU PENGFEI, XU KAIDONG, CHEN LONGBAO, WANG CHENGYI, CHENG SHIRAN, GUO SONG, SANG KANG, HU DONGDONG
Year of Publication 27.10.2023
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Year of Publication 27.10.2023
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Magnetic fluid shaft
LIU PENGFEI, XU KAIDONG, CHEN LONGBAO, WANG CHENGYI, CHENG SHIRAN, GUO SONG, SANG KANG, HU DONGDONG
Year of Publication 27.10.2023
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Year of Publication 27.10.2023
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Wafer stage device
LIU PENGFEI, XU KAIDONG, CHEN LONGBAO, WANG CHENGYI, CHENG SHIRAN, GUO SONG, SANG KANG, HU DONGDONG
Year of Publication 27.10.2023
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Year of Publication 27.10.2023
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Wafer stage device
LIU PENGFEI, XU KAIDONG, CHEN LONGBAO, WANG CHENGYI, CHENG SHIRAN, GUO SONG, SANG KANG, HU DONGDONG
Year of Publication 27.10.2023
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Year of Publication 27.10.2023
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WAFER STAGE DEVICE
CHENG, Shiran, XU, Kaidong, WANG, Chengyi, CHEN, Longbao, GUO, Song, LIU, Pengfei, HU, Dongdong, SANG, Kang
Year of Publication 26.10.2023
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Year of Publication 26.10.2023
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MAGNETIC FLUID SHAFT
CHENG, Shiran, XU, Kaidong, WANG, Chengyi, CHEN, Longbao, GUO, Song, LIU, Pengfei, HU, Dongdong, SANG, Kang
Year of Publication 26.10.2023
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Year of Publication 26.10.2023
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WAFER CARRIER DEVICE
CHENG, Shiran, XU, Kaidong, WANG, Chengyi, CHEN, Longbao, GUO, Song, LIU, Pengfei, HU, Dongdong, SANG, Kang
Year of Publication 26.10.2023
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Year of Publication 26.10.2023
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WAFER STAGE APPARATUS
CHENG, Shiran, XU, Kaidong, WANG, Chengyi, CHEN, Longbao, GUO, Song, LIU, Pengfei, HU, Dongdong, SANG, Kang
Year of Publication 26.10.2023
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Year of Publication 26.10.2023
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DEVICE FOR GAS INTAKE FROM EDGE AND PLASMA ETCHING SYSTEM
XU, Kaidong, LI, Xuedong, HU, Dongdong, LIU, Haiyang, LI, Hao, LIU, Xiaobo, CHEN, Shuai
Year of Publication 08.08.2024
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Year of Publication 08.08.2024
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Wafer position calibration method and device
ZHU XIAOQING, XU KAIDONG, LIU HAOHAO, LI QUANTENG, LIU HAIYANG, HU DONGDONG
Year of Publication 08.09.2023
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Year of Publication 08.09.2023
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ELECTROSTATIC CHUCK AND SEMICONDUCTOR CHIP PROCESSING DEVICE
XU, Kaidong, CHEN, Longbao, LI, Na, LI, Xuedong, HU, Dongdong, ZHANG, Yitao, HE, Xiaoming, LIU, Xiaobo
Year of Publication 25.07.2024
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Year of Publication 25.07.2024
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Cavity cover opening and closing auxiliary structure
LIU LEI, XU KAIDONG, CHEN LONGBAO, WANG CHENGYI, LIU HAIYANG, GUO SONG, WANG HAIDONG, HU DONGDONG
Year of Publication 15.08.2023
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Year of Publication 15.08.2023
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FOCUS RING AND PLASMA ETCHING DEVICE
XU, Kaidong, HU, Dongdong, LIU, Haiyang, LI, Hao, HE, Xiaoming, LIU, Xiaobo, CHEN, Shuai
Year of Publication 04.07.2024
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Year of Publication 04.07.2024
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