Residual stress assessment of interconnects by slot milling with FIB and geometric phase analysis
Wang, Qinghua, Xie, Huimin, Liu, Zhanwei, Lou, Xinhao, Wang, Jianfeng, Xu, Kewei, Zhang, Zhaohui, Liao, Jianhui, Gu, Changzhi
Published in Optics and lasers in engineering (01.11.2010)
Published in Optics and lasers in engineering (01.11.2010)
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Journal Article
Residual stress assessment of interconnects by slot milling with FIB and geometric phase analysis: MICRO AND NANO METROLOGY IN EXPERIMENTAL MECHANICS
QINGHUA WANG, HUIMIN XIE, ZHANWEI LIU, XINHAO LOU, JIANFENG WANG, KEWEI XU, ZHAOHUI ZHANG, JIANHUI LIAO, CHANGZHI GU
Published in Optics and lasers in engineering (2010)
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Published in Optics and lasers in engineering (2010)
Journal Article
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