Systems and methods for depositing low-κdielectric films
Ngo, Sure K, Yim, Kang Sub, Xia, Li-Qun, Liu, Yijun, Xie, Bo, Xiong, Ruitong
Year of Publication 07.03.2023
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Year of Publication 07.03.2023
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Second Generation Copper Dielectric Barrier (BLOk II): k Reduction and Interface Control To Improve TDDB and EM
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Published in ECS transactions (06.03.2009)
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Journal Article
Systems and methods for cleaning low-k deposition chambers
Ngo, Sure K, Yim, Kang Sub, Xia, Li-Qun, Liu, Yijun, Xie, Bo, Xiong, Ruitong
Year of Publication 07.02.2023
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Year of Publication 07.02.2023
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METHODS FOR FORMING LOW-Κ DIELECTRIC MATERIALS
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Year of Publication 31.10.2024
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Year of Publication 31.10.2024
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Hardmask tuning by electrode adjustment
Khaja, Abdul Aziz, Xia, Li-Qun, Tsiang, Michael Wenyoung, Cheng, Yayun, Hsiao, Kevin, Hu, Liangfa
Year of Publication 29.11.2022
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Year of Publication 29.11.2022
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SINGLE PRECURSOR LOW-K FILM DEPOSITION AND UV CURE FOR ADVANCED TECHNOLOGY NODE
NGO, Sure K, LIU, Yijun, YIM, Kang Sub, XIONG, Ruitong, XIE, Bo, XIA, Li-Qun
Year of Publication 30.06.2022
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Year of Publication 30.06.2022
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SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
Bhuyan, Bhaskar Jyoti, Xia, Li-Qun, Liu, Yijun, Li, Xiaobo, Lu, Rui, Gangopadhyay, Shruba, Bagby, Lauren, Xie, Bo, Xiong, Ruitong, Haverty, Michael, Kalutarage, Lakmal C
Year of Publication 14.03.2024
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Year of Publication 14.03.2024
Patent
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
Xia, Li-Qun, Liu, Yijun, Li, Xiaobo, Lu, Rui, Gangopadhyay, Shruba, Bagby, Lauren, Xie, Bo, Xiong, Ruitong, Haverty, Michael, Kalutarage, Lakmal C
Year of Publication 14.03.2024
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Year of Publication 14.03.2024
Patent
SYSTEMS AND METHODS FOR DEPOSITING LOW-Κ DIELECTRIC FILMS
GANGOPADHYAY, Shruba, HAVERTY, Michael, LU, Rui, LI, Xiaobo, KALUTARAGE, Lakmal C, LIU, Yijun, XIONG, Ruitong, BAGBY, Lauren, XIE, Bo, XIA, Li-Qun
Year of Publication 29.02.2024
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Year of Publication 29.02.2024
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HARDMASK TUNING BY ELECTRODE ADJUSTMENT
Khaja, Abdul Aziz, Xia, Li-Qun, Tsiang, Michael Wenyoung, Cheng, Yayun, Hsiao, Kevin, Hu, Liangfa
Year of Publication 28.04.2022
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Year of Publication 28.04.2022
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TENSILE NITRIDE DEPOSITION SYSTEMS AND METHODS
Xia, Li-Qun, Liu, Yijun, Yu, Hang, Tsiang, Michael Wenyoung, Hsiao, Kevin, Lin, Yichuen, Padhi, Deenesh
Year of Publication 28.04.2022
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Year of Publication 28.04.2022
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SYSTEMS AND METHODS FOR FORMING UV-CURED LOW-Κ DIELECTRIC FILMS
NGO, Sure, LIU, Yijun, YIM, Kang Sub, XIONG, Ruitong, XIE, Bo, XIA, Li-Qun
Year of Publication 14.04.2022
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Year of Publication 14.04.2022
Patent
SYSTEMS AND METHODS FOR FORMING UV-CURED LOW-K DIELECTRIC FILMS
Yim, Kang Sub, Xia, Li-Qun, Liu, Yijun, Ngo, Sure, Xie, Bo, Xiong, Ruitong
Year of Publication 07.04.2022
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Year of Publication 07.04.2022
Patent
SYSTEMS AND METHODS FOR DEPOSITING LOW-Κ DIELECTRIC FILMS
NGO, Sure, LIU, Yijun, YIM, Kang S, XIONG, Ruitong, XIE, Bo, XIA, Li-Qun
Year of Publication 24.03.2022
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Year of Publication 24.03.2022
Patent
SYSTEMS AND METHODS FOR DEPOSITING LOW-K DIELECTRIC FILMS
Yim, Kang Sub, Xia, Li-Qun, Liu, Yijun, Ngo, Sure, Xie, Bo, Xiong, Ruitong
Year of Publication 17.03.2022
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Year of Publication 17.03.2022
Patent