Wafer-Level Transfer Technologies for PZT-Based RF MEMS Switches
Guerre, Roland, Drechsler, Ute, Bhattacharyya, Debabrata, Rantakari, Pekka, Stutz, Richard, Wright, Robert V, Milosavljevic, Zlatoljub D, Vaha-Heikkila, Tauno, Kirby, Paul B, Despont, Michel
Published in Journal of microelectromechanical systems (01.06.2010)
Published in Journal of microelectromechanical systems (01.06.2010)
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Transfer of Functional Ceramic Thin Films Using a Thermal Release Process
Dou, Guangbin, Holmes, Andrew S., Yeatman, Eric M., Wright, Robert V., Kirby, Paul B., Yin, Chunyan
Published in Advanced materials (Weinheim) (11.03.2011)
Published in Advanced materials (Weinheim) (11.03.2011)
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Low-temperature CMOS-compatible 3D-integration of monocrystalline-silicon based PZT RF MEMS switch actuators on rf substrates
Saharil, Farizah, Wright, Robert V, Rantakari, Pekka, Kirby, Paul B, Vaha-Heikkila, Tauno, Niklaus, Frank, Stemme, Goran, Oberhammer, Joachim
Published in 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2010)
Published in 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) (01.01.2010)
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Conference Proceeding
Development of micromechanical and optical devices incorporating deposited PZT films
Wright, Robert V., Patel, Anil, Pealat, Michel, Nonninger, Ralph, Diels, Roger, Enoksson, Peter, Fox, Colin, Netter, Paul
Published in Integrated ferroelectrics (01.01.2001)
Published in Integrated ferroelectrics (01.01.2001)
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Lead-Strontium-Titanate varactor-tuned CPW bandstop filter on liquid crystal polymer substrates
Chun, Young-Hoon, Keller, Roman, Hong, Jia-Sheng, Fragkiadakis, Charalampos, Wright, Robert V., Kirby, Paul B.
Published in 2009 European Microwave Conference (EuMC) (01.09.2009)
Published in 2009 European Microwave Conference (EuMC) (01.09.2009)
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Conference Proceeding