Quantitative Measurement of Pattern Collapse and Particle Removal Force
Kim, Tae-Gon, Wostyn, Kurt L., Mertens, P., Busnaina, Ahmed A., Park, Jin-Goo
Published in ECS transactions (28.09.2007)
Published in ECS transactions (28.09.2007)
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Journal Article
A New Approach for FEOL Critical Wafer Surface Cleaning
Fischer, Thomas, Puri, Suraj, Hoyer, Ronald, Wostyn, Kurt L., Janssens, Tom
Published in ECS transactions (28.09.2007)
Published in ECS transactions (28.09.2007)
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Journal Article
Damage Cluster Analysis of Patterned Wafers during Solvent Spray Cleaning
Halder, Sandip, Wostyn, Kurt L., Andreas, Michael, Wada, Masayuki, Brems, Steven, Bearda, Twan, Pacco, Antoine, Kenis, Karine, Vos, Rita, Mertens, Paul
Published in ECS transactions (01.01.2009)
Published in ECS transactions (01.01.2009)
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Journal Article
Particle Removal and Damage Thresholds from Particle Removal and Damage Formation Frequency for High-Velocity-Aerosol Cleaning
Wostyn, Kurt L., Wada, Masayuki, Andreas, Michael, Kenis, Karine, Roussel, Philippe, Bearda, Twan, Leunissen, Peter, Mertens, Paul
Published in ECS transactions (01.01.2009)
Published in ECS transactions (01.01.2009)
Get full text
Journal Article
Damage Clustering and Damage-Size Distributions After Megasonic Cleaning
De Marco, Cinzia, Wostyn, Kurt L., Bearda, Twan, Sano, Ken-Ichi, Kenis, Karine, Janssens, Tom, Leunissen, Leonardus H.A., Eitoku, Atsuro, Mertens, P.
Published in ECS transactions (28.09.2007)
Published in ECS transactions (28.09.2007)
Get full text
Journal Article
Local Removal Frequency of Nano Particles in Megasonic Cleaning
Janssens, Tom, Wostyn, Kurt L., Arnauts, Sophia, De Geyter, Annelies, Bearda, Twan, Mertens, P.
Published in ECS transactions (28.09.2007)
Published in ECS transactions (28.09.2007)
Get full text
Journal Article
Particle Removal from Micrometer-Sized Trenches Using High-Velocity-Aerosol Cleaning and Comparison with Megasonic Tank Cleaning
Wostyn, Kurt L., Sano, Ken-Ichi, Eitoku, Atsuro, Janssens, Tom, Bearda, Twan, Leunissen, Leonardus H.A., Mertens, P.
Published in ECS transactions (28.09.2007)
Published in ECS transactions (28.09.2007)
Get full text
Journal Article
Particle Removal and Damage Thresholds from Particle Removal and Damage Formation Frequency for High-Velocity-Aerosol Cleaning
Wostyn, Kurt L., Wada, Masayuki, Andreas, Michael, Kenis, Karine, Roussel, Philippe, Bearda, Twan, Leunissen, Peter, Mertens, Paul
Published in Meeting abstracts (Electrochemical Society) (10.07.2009)
Published in Meeting abstracts (Electrochemical Society) (10.07.2009)
Get full text
Journal Article
A New Approach for FEOL Critical Wafer Surface Cleaning
Fischer, Thomas, Puri, Suraj, Hoyer, Ronald, Wostyn, Kurt L., Janssent, Tom
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
Get full text
Journal Article
Local Removal Frequency of Nano Particles in Megasonic Cleaning
Janssens, Tom, Wostyn, Kurt L., Arnauts, Sophia, De Geyter, Annelies, Bearda, Twan, Mertens, P.
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
Get full text
Journal Article
Quantitative Measurement of Pattern Collapse Force and Particle Removal Force
Kim, Tae-Gon, Wostyn, Kurt L., Mertens, P., Busnaina, Ahmed A., Park, Jin-Goo
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
Get full text
Journal Article
Damage Cluster Analysis of Patterned Wafers during Solvent Spray Cleaning
Halder, Sandip, Wostyn, Kurt L., Andreas, Michael, Wada, Masayuki, Brems, Steven, Bearda, Twan, Pacco, Antoine, Kenis, Karine, Vos, Rita, Mertens, Paul
Published in Meeting abstracts (Electrochemical Society) (10.07.2009)
Published in Meeting abstracts (Electrochemical Society) (10.07.2009)
Get full text
Journal Article
Particle Removal from Micron-Sized Trenches Using High-Velocity-Aerosol Cleaning and Comparison with Megasonic Tank Cleaning
Wostyn, Kurt L., Janssens, Tom, Bearda, Twan, Leunissen, Leonardus H.A., Mertens, P., Sano, Ken-Ichi, Eitoku, Atsuro
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
Get full text
Journal Article
Damage Clustering and Damage-Size Distributions After Megasonic Cleaning
De Marco, Cinzia, Wostyn, Kurt L., Bearda, Twan, Sano, Ken-Ichi, Kenis, Karine, Janssens, Tom, Leunissen, Leonardus H.A., Eitoku, Atsuro, Mertens, P.
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
Published in Meeting abstracts (Electrochemical Society) (28.09.2007)
Get full text
Journal Article