Surface profilometry of high aspect ratio features
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Conference Proceeding
VORTEX MACHINING: LOCALIZED SURFACE MODIFICATION USING AN OSCILLATING FIBER PROBE
Nowakowski, B. K., Smith, S. T., Mullany, B. A., Woody, S. C.
Published in Machining science and technology (30.11.2009)
Published in Machining science and technology (30.11.2009)
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Compact fiber-coupled three degree-of-freedom displacement interferometry for nanopositioning stage calibration
Gillmer, S R, Smith, R C G, Woody, S C, Ellis, J D
Published in Measurement science & technology (01.07.2014)
Published in Measurement science & technology (01.07.2014)
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