EPITAXY PROCESS SYSTEM COMPRISING AUTOMATIC CONVEYANCE SYSTEM, AND AUTOMATIC CONVEYANCE METHOD OF THE SAME
OISHI TAKAHIRO, SUDA NOBORU, HAN ZONG XUN, HUANG TSAN-HUA, WONG KIAN POH
Year of Publication 24.10.2019
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Year of Publication 24.10.2019
Patent
Epitaxy processing system with automatic transfer system and automatically transferring method thereof
HUANG, TSAN-HUA, WONG, KIAN-POH, NOBORU, SUDA, TAKAHIRO, OISHI, HAN, TSUNG-HSUN
Year of Publication 16.11.2019
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Year of Publication 16.11.2019
Patent