Technology scaling on High-K & Metal-Gate FinFET BTI reliability
Kyong Taek Lee, Wonchang Kang, Eun-Ae Chung, Gunrae Kim, Hyewon Shim, Hyunwoo Lee, Hyejin Kim, Minhyeok Choe, Nae-In Lee, Patel, Anuj, Junekyun Park, Jongwoo Park
Published in 2013 IEEE International Reliability Physics Symposium (IRPS) (01.04.2013)
Published in 2013 IEEE International Reliability Physics Symposium (IRPS) (01.04.2013)
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Conference Proceeding
Enhanced Reliability of 7-nm Process Technology Featuring EUV
Choi, Kihyun, Shim, Hyewon, Park, Junekyun, Cho, Youngwoo, Rhee, Hwasung, Pae, Sangwoo, Sagong, Hyun Chul, Kang, Wonchang, Kim, Hyunjin, Hai, Jiang, Lee, Miji, Kim, Bomi, Lee, Mi-Ji, Lee, Soonyoung
Published in IEEE transactions on electron devices (01.12.2019)
Published in IEEE transactions on electron devices (01.12.2019)
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Journal Article
Enhanced Reliability of 7nm Process Technology featuring EUV
Choi, Kihyun, Sagong, Hyun Chul, Kang, Wonchang, Kim, Hyunjin, Hai, Jiang, Lee, Miji, Kim, Bomi, Lee, Mi-ji, Lee, Soonyoung, Shim, Hyewon, Park, Junekyun, Cho, Youngwoo, Rhee, Hwasung, Pae, Sangwoo
Published in 2019 Symposium on VLSI Technology (01.06.2019)
Published in 2019 Symposium on VLSI Technology (01.06.2019)
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Conference Proceeding