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Year of Publication 23.11.2023
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Sealing Ring
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GAS BAFFLE FOR HIGH PRESSURE FLUID DISTRIBUTION AND SUBSTRATE PROCSESSING APPARATUS
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Year of Publication 23.05.2024
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SUBSTRATE PROCESSING APPARATUS AND METHOD
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Year of Publication 09.11.2023
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SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD USING THE SAME
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Year of Publication 02.11.2022
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SUBSTRATE PROCESSING APPARATUS AND METHOD
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Year of Publication 29.06.2023
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Year of Publication 29.06.2023
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Substrate processing apparatus and method
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Year of Publication 26.06.2023
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LIQUID SUPPLY UNIT APPARATUS AND METHOD FOR TREATING A SUBSTRATE INCLUDING THE SAME
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Year of Publication 21.06.2022
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APPARATUS AND METHOD FOR TREATING SUBSTRATE
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Year of Publication 21.06.2022
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Year of Publication 21.06.2022
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APPARATUS AND METHOD FOR TREATING SUBSTRATE
SUNG JIN YEONG, WON JOON HO, CHOI HAE WON, CHOI KI HOON, ANTON KORIAKIN, KIM EUNG SU, HEO PIL KYUN
Year of Publication 21.06.2022
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Year of Publication 21.06.2022
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SUBSTRATE PROCESSING DEVICE AND METHOD
PARK JI HWAN, KORIAKIN ANTON, PARK SANG-JINE, LEE KUN-TACK, SHIN SEUNG-MIN, SHIN JAE WON, WON JOON HO, CHOI HAE WON, HEO PIL KYUN
Year of Publication 11.05.2023
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Year of Publication 11.05.2023
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Substrate processing apparatus and method thereof
PARK JI HWAN, PARK SANG JIN, SHIN SEUNG MIN, SHIN JAE WON, WON JOON HO, CHOI HAE WON, LEE KUN TACK, ANTON KORIAKIN, HEO PIL KYUN
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Year of Publication 03.05.2023
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APPARATUS AND METHOD FOR TREATING SUBSTRATE
SUNG JIN YEONG, WON JOON HO, CHOI HAE WON, CHOI KI HOON, ANTON KORIAKIN, KIM EUNG SU, HEO PIL KYUN
Year of Publication 25.05.2022
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Year of Publication 25.05.2022
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FLOW RESISTANCE GENERATION UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
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Year of Publication 20.04.2023
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Flow resistance generating unit and substrate treating apparatus including the same
SUNG JIN YEONG, SHIN JAE WON, WON JOON HO, KANG HYUNG SEOK, CHOI HAE WON, ANTON KORIAKIN, KIM EUNG SU, LEE JAE SEONG, KIM MIN WOO, HEO PIL KYUN
Year of Publication 17.04.2023
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Year of Publication 17.04.2023
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