Fabrication and Characterization of the Charge-Plasma Diode
Rajasekharan, Bijoy, Hueting, Raymond J E, Salm, Cora, van Hemert, Tom, Wolters, Rob A M, Schmitz, Jurriaan
Published in IEEE electron device letters (01.06.2010)
Published in IEEE electron device letters (01.06.2010)
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Journal Article
Low-resistivity molybdenum obtained by atomic layer deposition
van der Zouw, Kees, van der Wel, Bernhard Y., Aarnink, Antonius A. I., Wolters, Rob A. M., Gravesteijn, Dirk J., Kovalgin, Alexey Y.
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.09.2023)
Published in Journal of vacuum science & technology. A, Vacuum, surfaces, and films (01.09.2023)
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Journal Article
Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes
Yang, Mengdi, Aarnink, Antonius A. I., Kovalgin, Alexey Y., Wolters, Rob A. M., Schmitz, Jurriaan
Published in Physica status solidi. A, Applications and materials science (01.07.2015)
Published in Physica status solidi. A, Applications and materials science (01.07.2015)
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Journal Article
Read-Proof Hardware from Protective Coatings
Tuyls, Pim, Schrijen, Geert-Jan, Škorić, Boris, van Geloven, Jan, Verhaegh, Nynke, Wolters, Rob
Published in Cryptographic Hardware and Embedded Systems - CHES 2006 (2006)
Published in Cryptographic Hardware and Embedded Systems - CHES 2006 (2006)
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Book Chapter
Conference Proceeding
An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance
Kovalgin, A. Y., Tiggelman, N., Wolters, R. A. M.
Published in IEEE transactions on electron devices (01.02.2012)
Published in IEEE transactions on electron devices (01.02.2012)
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Journal Article
Novel Test Structures for Dedicated Temperature Budget Determination
Faber, E. J., Wolters, R. A. M., Schmitz, J.
Published in IEEE transactions on semiconductor manufacturing (01.08.2012)
Published in IEEE transactions on semiconductor manufacturing (01.08.2012)
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Journal Article
Conference Proceeding
On Device Architectures, Subthreshold Swing, and Power Consumption of the Piezoelectric Field-Effect Transistor ( -FET)
Hueting, Raymond J. E., Van Hemert, Tom, Kaleli, Buket, Wolters, Rob A. M., Schmitz, Jurriaan
Published in IEEE journal of the Electron Devices Society (01.05.2015)
Published in IEEE journal of the Electron Devices Society (01.05.2015)
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Journal Article
Effects of Oxygen, Nitrogen and Fluorine on the Crystallinity of Tungsten by Hot-Wire Assisted ALD
Yang, Mengdi, Aarnink, Antonius A. I., Wolters, Rob A. M., Schmitz, Jurriaan, Kovalgin, Alexey Y.
Published in ECS journal of solid state science and technology (01.01.2017)
Published in ECS journal of solid state science and technology (01.01.2017)
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Journal Article
Electrical Characterization of Thin-Film Structures With Redeposited Sidewalls
Roy, D, in 't Zandt, M A A, Wolters, R A M
Published in IEEE transactions on electron devices (01.04.2011)
Published in IEEE transactions on electron devices (01.04.2011)
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Journal Article
Dealing with leakage current in TLM and CTLM structures with vertical junction isolation
Bystrova, Svetlana N., Smits, Sander M., Klootwijk, Johan H., Wolters, Rob A. M., Kovalgin, Alexey Y., Nanver, Lis K., Schmitz, Jurriaan
Published in 2017 International Conference of Microelectronic Test Structures (ICMTS) (01.03.2017)
Published in 2017 International Conference of Microelectronic Test Structures (ICMTS) (01.03.2017)
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Conference Proceeding
Qualitative and quantitative characterization of outgassing from SU-8
Melai, Joost, Salm, Cora, Wolters, Rob, Schmitz, Jurriaan
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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Journal Article
Conference Proceeding
Comb Capacitor Structures for On-Chip Physical Uncloneable Function
Roy, D., Klootwijk, J.H., Verhaegh, N., Roosen, H., Wolters, R.
Published in IEEE transactions on semiconductor manufacturing (01.02.2009)
Published in IEEE transactions on semiconductor manufacturing (01.02.2009)
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Journal Article
Growth Rate Determination through Automated TEM Image Analysis: Crystallization Studies of Doped SbTe Phase-Change Thin Films
Oosthoek, Jasper L.M., Kooi, Bart J., De Hosson, Jeff T.M., Wolters, Rob A.M., Gravesteijn, Dirk J., Attenborough, Karen
Published in Microscopy and microanalysis (01.06.2010)
Published in Microscopy and microanalysis (01.06.2010)
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Journal Article
Influence of Surrounding Dielectrics on the Data Retention Time of Doped Sb2Te Phase Change Material
Jedema, Friso, in `t Zandt, Micha, Wolters, Rob, Gravesteijn, Dirk
Published in Jpn J Appl Phys (01.02.2011)
Published in Jpn J Appl Phys (01.02.2011)
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Journal Article
Novel test structures for temperature budget determination during wafer processing
Faber, Erik J, Wolters, Rob A M, Schmitz, Jurriaan
Published in 2010 International Conference on Microelectronic Test Structures (ICMTS) (01.03.2010)
Published in 2010 International Conference on Microelectronic Test Structures (ICMTS) (01.03.2010)
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Conference Proceeding