Impact of TiN Barrier Layer on Contact Resistance of Tungsten Filled Vias
Schulze, S., Wolansky, D., Katzer, J., Schubert, M. A., Costina, I., Mai, A.
Published in IEEE transactions on semiconductor manufacturing (01.11.2018)
Published in IEEE transactions on semiconductor manufacturing (01.11.2018)
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High performance metal–insulator–metal capacitors with atomic vapor deposited HfO2 dielectrics
Lukosius, M., Walczyk, Ch, Fraschke, M., Wolansky, D., Richter, H., Wenger, Ch
Published in Thin solid films (31.05.2010)
Published in Thin solid films (31.05.2010)
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Processing and integration of graphene in a 200 mm wafer Si technology environment
Lisker, M., Lukosius, M., Fraschke, M., Kitzmann, J., Dabrowski, J., Fursenko, O., Kulse, P., Schulz, K., Krüger, A., Drews, J., Schulze, S., Wolansky, D., Schubert, A.M., Katzer, J., Stolarek, D., Costina, I., Wolff, A., Dziallas, G., Coccetti, F., Mai, A.
Published in Microelectronic engineering (15.01.2019)
Published in Microelectronic engineering (15.01.2019)
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Modular integration of annular TSV structures filled with tungsten in a 0.25μm SiGe:C BiCMOS technology
Marschmeyer, S., Berthold, J., Krüger, A., Lisker, M., Scheit, A., Schulze, S., Trusch, A., Wietstruck, M., Wolansky, D.
Published in Microelectronic engineering (02.04.2015)
Published in Microelectronic engineering (02.04.2015)
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Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)
Birkholz, M, Ehwald, K-E, Basmer, T, Kulse, P, Reich, C, Drews, J, Genschow, D, Haak, U, Marschmeyer, S, Matthus, E, Schulz, K, Wolansky, D, Winkler, W, Guschauski, T, Ehwald, R
Published in Journal of applied physics (28.06.2013)
Published in Journal of applied physics (28.06.2013)
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Corrosion-resistant metal layers from a CMOS process for bioelectronic applications
Birkholz, M., Ehwald, K.-E., Wolansky, D., Costina, I., Baristiran-Kaynak, C., Fröhlich, M., Beyer, H., Kapp, A., Lisdat, F.
Published in Surface & coatings technology (15.03.2010)
Published in Surface & coatings technology (15.03.2010)
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Crosstalk suppression of CMOS compatible AlN based SAW devices on low resistive Si(100)
Kaletta, Udo Ch, Wolansky, D., Wipf, M. Fraschke Ch, Wenger, Ch
Published in Physica status solidi. C (01.02.2014)
Published in Physica status solidi. C (01.02.2014)
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Fabrication of MEMS actuators from the BEOL of a 0.25μm BiCMOS technology platform
Kulse, P., Birkholz, M., Ehwald, K.-E., Bauer, J., Drews, J., Haak, U., Höppner, W., Katzer, J., Schulz, K., Wolansky, D.
Published in Microelectronic engineering (01.09.2012)
Published in Microelectronic engineering (01.09.2012)
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A 0.13 \mu} SiGe BiCMOS Technology Featuring f /f of 240/330 GHz and Gate Delays Below 3 ps
Rücker, Holger, Heinemann, Bernd, Winkler, Wolfgang, Barth, R, Borngraber, J, Drews, J, Fischer, Gerhard G, Fox, Alexander, Grabolla, Thomas, Haak, U, Knoll, Dieter, Korndörfer, Falk, Mai, Andreas, Marschmeyer, Steffen, Schley, P, Schmidt, D, Schmidt, J, Schubert, Markus Andreas, Schulz, K, Tillack, Bernd, Wolansky, D, Yamamoto, Yuji
Published in IEEE journal of solid-state circuits (01.09.2010)
Published in IEEE journal of solid-state circuits (01.09.2010)
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Gigahertz monolithic delay lines for surface acoustic waves on Silicon
Santos, P V, Rauwerdink, S, Biermann, K, Drescher, B, Seidel, W, Kaynak, M, Kaletta, U, Fraschke, M, Wolansky, D, Wenger, Ch
Published in IOP conference series. Materials Science and Engineering (01.01.2012)
Published in IOP conference series. Materials Science and Engineering (01.01.2012)
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Effects of various Co/TiN and Co/Ti layer stacks and the salicide rapid thermal process conditions on cobalt silicide formation
Buschbaum, S., Fursenko, O., Bolze, D., Wolansky, D., Melnik, V., Nieß, J., Lerch, W.
Published in Microelectronic engineering (01.10.2004)
Published in Microelectronic engineering (01.10.2004)
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Development of spectroscopic ellipsometry as in-line control for Co SALICIDE process
Fursenko, O, Bauer, J, Goryachko, A, Bolze, D, Zaumseil, P, Krüger, D, Wolansky, D, Bugiel, E, Tillack, B
Published in Thin solid films (01.03.2004)
Published in Thin solid films (01.03.2004)
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SiGe HBT technology with fT/fmax of 300GHz/500GHz and 2.0 ps CML gate delay
Heinemann, B, Barth, R, Bolze, D, Drews, J, Fischer, G G, Fox, A, Fursenko, O, Grabolla, T, Haak, U, Knoll, D, Kurps, R, Lisker, M, Marschmeyer, S, Rücker, H, Schmidt, D, Schmidt, J, Schubert, M A, Tillack, B, Wipf, C, Wolansky, D, Yamamoto, Y
Published in 2010 International Electron Devices Meeting (01.12.2010)
Published in 2010 International Electron Devices Meeting (01.12.2010)
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Conference Proceeding
Antenna array of E-shaped patches for indoor receiving of the digital TV signal
Wolansky, D., Raida, Z.
Published in 2011 International Conference on Electromagnetics in Advanced Applications (01.09.2011)
Published in 2011 International Conference on Electromagnetics in Advanced Applications (01.09.2011)
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Conference Proceeding
Circuit applications of high-performance SiGe:C HBTs integrated in BiCMOS technology
Winkler, W, Borngräber, J, Heinemann, B, Rücker, H, Barth, R, Bauer, J, Bolze, D, Drews, J, Ehwald, K.-E, Grabolla, T, Haak, U, Höppner, W, Knoll, D, Krüger, D, Kuck, B, Kurps, R, Marschmeyer, M, Richter, H, Schley, P, Schmidt, D, Scholz, R, Tillack, B, Wolansky, D, Wulf, H.-E, Yamamoto, Y, Zaumseil, P
Published in Applied surface science (15.03.2004)
Published in Applied surface science (15.03.2004)
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Filtering antennas: Comparison of different concepts
Kufa, M., Raida, Z., Vsetula, P., Wolansky, D.
Published in 2014 IEEE-APS Topical Conference on Antennas and Propagation in Wireless Communications (APWC) (01.08.2014)
Published in 2014 IEEE-APS Topical Conference on Antennas and Propagation in Wireless Communications (APWC) (01.08.2014)
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Conference Proceeding
Compact arrays fed by substrate integrated waveguides
Lacik, J., Mikulasek, T., Puskely, J., Raida, Z., Wolansky, D.
Published in 2014 IEEE-APS Topical Conference on Antennas and Propagation in Wireless Communications (APWC) (01.08.2014)
Published in 2014 IEEE-APS Topical Conference on Antennas and Propagation in Wireless Communications (APWC) (01.08.2014)
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Conference Proceeding
Ultrathin TiN Membranes as a Technology Platform for CMOS-Integrated MEMS and BioMEMS Devices
Birkholz, M., Ehwald, K.-E., Kulse, P., Drews, J., Fröhlich, M., Haak, U., Kaynak, M., Matthus, E., Schulz, K., Wolansky, D.
Published in Advanced functional materials (10.05.2011)
Published in Advanced functional materials (10.05.2011)
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Novel collector design for high-speed SiGe:C HBTs
Heinemann, B., Rucker, H., Barth, R., Bauer, J., Bolze, D., Bugiel, E., Drews, J., Ehwald, K.-E., Grabolla, T., Haak, U., Hoppner, W., Knoll, D., Kruger, D., Kuck, B., Kurps, R., Marschmeyer, M., Richter, H.H., Schley, P., Schmidt, D., Scholz, R., Tillack, B., Winkler, W., Wolnsky, D., Wulf, H.-E., Yamamoto, Y., Zaumseil, P.
Published in Digest. International Electron Devices Meeting (2002)
Published in Digest. International Electron Devices Meeting (2002)
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