Performance of a central delivery system for metalorganic precursors
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Antimony surfactant for epitaxial growth of SiGe buffer layers at high deposition temperatures
Storck, Peter, Vorderwestner, Martin, Kondratyev, Alexey, Talalaev, Roman, Amamchyan, Art, Woelk, Egbert
Published in Thin solid films (2010)
Published in Thin solid films (2010)
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Safer alternative liquid germanium precursors for relaxed graded SiGe layers and strained silicon by MOVPE
Shenai, Deo V., DiCarlo, Ronald L., Power, Michael B., Amamchyan, Artashes, Goyette, Randall J., Woelk, Egbert
Published in Journal of crystal growth (2007)
Published in Journal of crystal growth (2007)
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