Low Temperature, Selective Atomic Layer Deposition of Nickel Metal Thin Films
Kerrigan, Marissa M, Klesko, Joseph P, Blakeney, Kyle J, Winter, Charles H
Published in ACS applied materials & interfaces (25.04.2018)
Published in ACS applied materials & interfaces (25.04.2018)
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Journal Article
Ferromagnetic resonance of Co thin films grown by atomic layer deposition on the Sb2Te3 topological insulator
Longo, Emanuele, Wiemer, Claudia, Belli, Matteo, Cecchini, Raimondo, Longo, Massimo, Cantoni, Matteo, Rinaldi, Christian, Overbeek, Michael D., Winter, Charles H., Gubbiotti, Gianluca, Tallarida, Graziella, Fanciulli, Marco, Mantovan, Roberto
Published in Journal of magnetism and magnetic materials (01.09.2020)
Published in Journal of magnetism and magnetic materials (01.09.2020)
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Journal Article
Cu-Cu Bonding Using Selective Cobalt Atomic Layer Deposition for 2.5-D/3-D Chip Integration Technologies
Li, Ming-Jui, Breeden, Michael, Wang, Victor, Hollin, Jonathan, Linn, Nyi Myat Khine, Winter, Charles H., Kummel, Andrew, Bakir, Muhannad S.
Published in IEEE transactions on components, packaging, and manufacturing technology (2011) (01.12.2020)
Published in IEEE transactions on components, packaging, and manufacturing technology (2011) (01.12.2020)
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Journal Article
Atomic Layer Deposition of Ga2O3 Films from a Dialkylamido-Based Precursor
Dezelah, Niinistö, Jaakko, Arstila, Kai, Niinistö, Lauri, Winter, Charles H
Published in Chemistry of materials (24.01.2006)
Published in Chemistry of materials (24.01.2006)
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Journal Article
Low Temperature Thermal Atomic Layer Deposition of Cobalt Metal Films
Klesko, Joseph P, Kerrigan, Marissa M, Winter, Charles H
Published in Chemistry of materials (09.02.2016)
Published in Chemistry of materials (09.02.2016)
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Journal Article
Thermal atomic layer deposition of Er 2 O 3 films from a volatile, thermally stable enaminolate precursor
Jayakodiarachchi, Navoda, Liu, Rui, Dharmadasa, Chamod D, Hu, Xiaobing, Savage, Donald E, Ward, Cassandra L, Evans, Paul G, Winter, Charles H
Published in Dalton transactions : an international journal of inorganic chemistry (15.08.2023)
Published in Dalton transactions : an international journal of inorganic chemistry (15.08.2023)
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Journal Article
Thermal atomic layer deposition of Er2O3 films from a volatile, thermally stable enaminolate precursor
Jayakodiarachchi, Navoda, Liu, Rui, Dharmadasa, Chamod D, Hu, Xiaobing, Savage, Donald E, Ward, Cassandra L, Evans, Paul G, Winter, Charles H
Published in Dalton transactions : an international journal of inorganic chemistry (15.08.2023)
Published in Dalton transactions : an international journal of inorganic chemistry (15.08.2023)
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Journal Article
Thermal Atomic Layer Deposition of Titanium Films Using Titanium Tetrachloride and 2‑Methyl-1,4-bis(trimethylsilyl)-2,5-cyclohexadiene or 1,4-Bis(trimethylsilyl)-1,4-dihydropyrazine
Klesko, Joseph P, Thrush, Christopher M, Winter, Charles H
Published in Chemistry of materials (28.07.2015)
Published in Chemistry of materials (28.07.2015)
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Journal Article
Growth of Ta2SnO6 Films, a Candidate Wide-Band-Gap p‑Type Oxide
Barone, Matthew, Foody, Michael, Hu, Yaoqiao, Sun, Jiaxin, Frye, Bailey, Perera, S. Sameera, Subedi, Biwas, Paik, Hanjong, Hollin, Jonathan, Jeong, Myoungho, Lee, Kiyoung, Winter, Charles H, Podraza, Nikolas J, Cho, Kyeongjae, Hock, Adam, Schlom, Darrell G
Published in Journal of physical chemistry. C (24.02.2022)
Published in Journal of physical chemistry. C (24.02.2022)
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Journal Article
Atomic layer annealing with radio-frequency substrate bias for control of grain morphology in gallium nitride thin films
McLeod, Aaron J., Lee, Ping C., Ueda, Scott T., Devereaux, Zachary J., Winter, Charles H., Spiegelman, Jeff, Kanjolia, Ravindra, Moinpour, Mansour, Kummel, Andrew C.
Published in MRS bulletin (01.11.2023)
Published in MRS bulletin (01.11.2023)
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Journal Article
Thermal atomic layer deposition of rhenium nitride and rhenium metal thin films using methyltrioxorhenium
Cwik, Stefan, Woods, Keenan N, Perera, S. Sameera, Saly, Mark J, Knisley, Thomas J, Winter, Charles H
Published in Dalton transactions : an international journal of inorganic chemistry (14.12.2021)
Published in Dalton transactions : an international journal of inorganic chemistry (14.12.2021)
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Journal Article
Substrate selectivity in the low temperature atomic layer deposition of cobalt metal films from bis(1,4-di-tert-butyl-1,3-diazadienyl)cobalt and formic acid
Kerrigan, Marissa M, Klesko, Joseph P, Rupich, Sara M, Dezelah, Charles L, Kanjolia, Ravindra K, Chabal, Yves J, Winter, Charles H
Published in The Journal of chemical physics (07.02.2017)
Published in The Journal of chemical physics (07.02.2017)
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