Germanium MOSFET Devices: Advances in Materials Understanding, Process Development, and Electrical Performance
Brunco, D. P., De Jaeger, B., Eneman, G., Mitard, J., Hellings, G., Satta, A., Terzieva, V., Souriau, L., Leys, F. E., Pourtois, G., Houssa, M., Winderickx, G., Vrancken, E., Sioncke, S., Opsomer, K., Nicholas, G., Caymax, M., Stesmans, A., Van Steenbergen, J., Mertens, P. W., Meuris, M., Heyns, M. M.
Published in Journal of the Electrochemical Society (2008)
Published in Journal of the Electrochemical Society (2008)
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Journal Article
Optimisation of a thin epitaxial Si layer as Ge passivation layer to demonstrate deep sub-micron n- and p-FETs on Ge-On-Insulator substrates
De Jaeger, B., Bonzom, R., Leys, F., Richard, O., Steenbergen, J. Van, Winderickx, G., Moorhem, E. Van, Raskin, G., Letertre, F., Billon, T., Meuris, M., Heyns, M.
Published in Microelectronic engineering (01.06.2005)
Published in Microelectronic engineering (01.06.2005)
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Conference Proceeding
Investigation of PECVD dielectrics for nondispersive metal-insulator-metal capacitors
Van Huylenbroeck, S., Decoutere, S., Venegas, R., Jenei, S., Winderickx, G.
Published in IEEE electron device letters (01.04.2002)
Published in IEEE electron device letters (01.04.2002)
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Journal Article
Ge deep sub-micron HiK/MG pFETs with superior drive compared to Si HiK/MG state-of-the-art reference
De Jaeger, B, Kaczer, B, Zimmerman, P, Opsomer, K, Winderickx, G, Van Steenbergen, J, Van Moorhem, E, Terzieva, V, Bonzom, R, Leys, F, Arena, C, Bauer, M, Werkhoven, C, Caymax, M, Meuris, M, Heyns, M
Published in Semiconductor science and technology (01.01.2007)
Published in Semiconductor science and technology (01.01.2007)
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Conference Proceeding
Record ION/IOFF performance for 65nm Ge pMOSFET and novel Si passivation scheme for improved EOT scalability
Mitard, J., De Jaeger, B., Leys, F.E., Hellings, G., Martens, K., Eneman, G., Brunco, D.P., Loo, R., Lin, J.C., Shamiryan, D., Vandeweyer, T., Winderickx, G., Vrancken, E., Yu, C.H., De Meyer, K., Caymax, M., Pantisano, L., Meuris, M., Heyns, M.M.
Published in 2008 IEEE International Electron Devices Meeting (01.12.2008)
Published in 2008 IEEE International Electron Devices Meeting (01.12.2008)
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Conference Proceeding
High performance Ge pMOS devices using a Si-compatible process flow
Zimmerman, P., Nicholas, G., De Jaeger, B., Kaczer, B., Stesmans, A., Ragnarsson, L.-A., Brunco, D.P., Leys, F.E., Caymax, M., Winderickx, G., Opsomer, K., Meuris, M., Heyns, M.M.
Published in 2006 International Electron Devices Meeting (01.12.2006)
Published in 2006 International Electron Devices Meeting (01.12.2006)
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Conference Proceeding
Impact of EOT scaling down to 0.85nm on 70nm Ge-pFETs technology with STI
Mitard, J., Shea, C., DeJaeger, B., Pristera, A., Wang, G., Houssa, M., Eneman, G., Hellings, G., Wang, W.E., Lin, J.C., Leys, F.E., Loo, R., Winderickx, G., Vrancken, E., Stesmans, A., DeMeyer, K., Caymax, M., Pantisano, L., Meuris, M., Heyns, M.
Published in 2009 Symposium on VLSI Technology (01.06.2009)
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Published in 2009 Symposium on VLSI Technology (01.06.2009)
Conference Proceeding
Ge deep sub-micron pFETs with etched TaN metal gate on a high-k dielectric, fabricated in a 200mm silicon prototyping line
De Jaeger, B., Houssa, M., Satta, A., Kubicek, S., Verheyen, P., Van Steenbergen, J., Croon, J., Kaczer, B., Van Elshocht, S., Delabie, A., Kunnen, E., Sleeckx, E., Teerlinck, I., Lindsay, R., Schram, T., Chiarella, T., Degraeve, R., Conard, T., Poortmans, J., Winderickx, G., Boullart, W., Schaekers, M., Mertens, P.W., Caymax, M., Vandervorst, W., Van Moorhem, E., Biesemans, S., De Meyer, K., Ragnarsson, L., Lee, S., Kota, G., Raskin, G., Mijlemans, P., Autran, J.-L., Afanas'ev, V., Stesmans, A., Meuris, M., Heyns, M.
Published in Proceedings of the 30th European Solid-State Circuits Conference (IEEE Cat. No.04EX850) (2004)
Published in Proceedings of the 30th European Solid-State Circuits Conference (IEEE Cat. No.04EX850) (2004)
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Conference Proceeding
(Invited) Selective Epitaxial Growth of III-V Semiconductor Heterostructures on Si Substrates for Logic Applications
Nguyen, Ngoc Duy, Wang, Gang, Brammertz, Guy, Leys, Maarten, Waldron, Niamh, Winderickx, Gillis, Lismont, Kevin, Dekoster, J., Loo, Roger, Meuris, Marc, Degroote, Stefan, Buttitta, Francesco, O'Neil, Barry, Féron, Olivier, Lindner, Johannes, Schulte, Frank, Schineller, Bernd, Heuken, Michael, Caymax, Matty
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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Web Resource
A 400GHz fMAX fully self-aligned SiGe:C HBT architecture
Van Huylenbroeck, S., Sibaja-Hernandez, A., Venegas, R., You, S., Winderickx, G., Radisic, D., Lee, W., Ong, P., Vandeweyer, T., Nguyen, N.D., De Meyer, K., Decoutere, S.
Published in 2009 IEEE Bipolar/BiCMOS Circuits and Technology Meeting (01.10.2009)
Published in 2009 IEEE Bipolar/BiCMOS Circuits and Technology Meeting (01.10.2009)
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Conference Proceeding
Web Resource
The future of high- K on pure germanium and its importance for Ge CMOS
Meuris, M., Delabie, A., Van Elshocht, S., Kubicek, S., Verheyen, P., De Jaeger, B., Van Steenbergen, J., Winderickx, G., Van Moorhem, E., Puurunen, R.L., Brijs, B., Caymax, M., Conard, T., Richard, O., Vandervorst, W., Zhao, C., De Gendt, S., Schram, T., Chiarella, T., Onsia, B., Teerlinck, I., Houssa, M., Mertens, P.W., Raskin, G., Mijlemans, P., Biesemans, S., Heyns, M.M.
Published in Materials science in semiconductor processing (01.02.2005)
Published in Materials science in semiconductor processing (01.02.2005)
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Journal Article
Key Issues for the Development of a Ge CMOS Device in an Advanced IC Circuit
Meuris, Marc M., Martens, K., De Jaegar, B., Van Steenbergen, J., Bonzom, Renaud, Caymax, Matty R., Houssa, M., Kaczer, Ben, Leys, Frederik, Nelis, Daniel, Opsomer, Karl, Pourghaderi, A. M., Satta, A., Simoen, Eddy R., Terzieva, Valentina, Souriau, Laurent, Bellenger, F., Brammertz, Guy, Nicholas, G., Scarozza, M., Huyghebaert, C., Winderickx, Gillis, Loo, Roger, Clarysse, Trudo, Conard, Thierry, Bender, Hugo, Benedetti, Alessandro, Todi, R., Delabie, A., Hellin, David, Van Daele, Benny, Sioncke, Sonja, Mertens, Paul W., De Meyer, Krtistien, Van Elshocht, Sven, Vandervorst, Wilfried, Zimmerman, Paul, Brunco, David P., Heyns, Marc M.
Published in ECS transactions (20.10.2006)
Published in ECS transactions (20.10.2006)
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Journal Article
Integration of III-V on Si for High-Mobility CMOS
Waldron, N., Gang Wang, Ngoc Duy Nguyen, Orzali, T., Merckling, C., Brammertz, G., Ong, P., Winderickx, G., Hellings, G., Eneman, G., Caymax, M., Meuris, M., Horiguchi, N., Thean, A.
Published in 2012 International Silicon-Germanium Technology and Device Meeting (ISTDM) (01.06.2012)
Published in 2012 International Silicon-Germanium Technology and Device Meeting (ISTDM) (01.06.2012)
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Conference Proceeding
P2-033: Molecular determinants of the phosphorylation and aggregation of human protein tau in a yeast model
Winderickx, Joris G., Vanhelmont, Thomas, Vandebroek, Tom, Pellens, Klaartje, De Vos, Ann, Terwel, Dick, Zabrocki, Piotr, Van Leuven, Fred
Published in Alzheimer's & dementia (01.07.2006)
Published in Alzheimer's & dementia (01.07.2006)
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Journal Article
Selective Epitaxial Growth of GaAs on Ge Substrates with a SiO2 Pattern
Brammertz, G, Caymax, M, Mols, Y, Degroote, S, Leys, M, Van Steenbergen, J, Winderickx, G, Borghs, G, Meuris, M
Year of Publication 26.03.2007
Year of Publication 26.03.2007
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Journal Article
A Novel Fully Self-Aligned SiGe:C HBT Architecture Featuring a Single-Step Epitaxial Collector-Base Process
Donkers, J.J.T.M., Vanhoucke, T., Vleugels, F., Winderickx, G., Kunnen, E., Peeters, S., Baute, D., De Vos, B., Vandeweyer, T., Loo, R., Venegas, R., Kramer, M.C.J.C.M., Pijper, R., Voogt, F.C., Decoutere, S., Hijzen, E.A., Van Huylenbroeck, S., Choi, L.J., Meunier-Beillard, P., Sibaja-Hernandez, A., Boccardi, G., van Noort, W., Hurkx, G.A.M.
Published in 2007 IEEE International Electron Devices Meeting (01.12.2007)
Published in 2007 IEEE International Electron Devices Meeting (01.12.2007)
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Conference Proceeding
Ge Deep Sub-Micron HiK/MG pFET with Superior Drive Compared to Si HiK/MG State-of-the-Art Reference
DeJaeger, B., Kaczer, B., Zimmerman, P., Opsomer, K., Winderickx, G., Van Steenbergen, J., Van Moorhem, E., Bonzom, R., Leys, F., Arena, C., Bauer, M., Werkhoven, C., Meuris, M., Heyns, M.
Published in 2006 International SiGe Technology and Device Meeting (2006)
Published in 2006 International SiGe Technology and Device Meeting (2006)
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Conference Proceeding
Selective Epitaxial Growth of GaAs on Ge Substrates with a SiO2 Pattern
Brammertz, G, Caymax, M, Mols, Y, Degroote, S, Leys, M, J Van Steenbergen, Winderickx, G, Borghs, G, Meuris, M
Published in arXiv.org (26.03.2007)
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Published in arXiv.org (26.03.2007)
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