Template fabrication schemes for step and flash imprint lithography
Bailey, T.C., Resnick, D.J., Mancini, D., Nordquist, K.J., Dauksher, W.J., Ainley, E., Talin, A., Gehoski, K., Baker, J.H., Choi, B.J., Johnson, S., Colburn, M., Meissl, M., Sreenivasan, S.V., Ekerdt, J.G., Willson, C.G.
Published in Microelectronic engineering (01.07.2002)
Published in Microelectronic engineering (01.07.2002)
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Journal Article
Conference Proceeding
Advanced step and flash nanoimprint lithography using UV-sensitive hard mask underlayer material
Takei, S., Ogawa, T., Deschner, R., Hanabata, M., Willson, C.G.
Published in Micro & nano letters (01.04.2010)
Published in Micro & nano letters (01.04.2010)
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Journal Article
Fabrication of multi-tiered structures on step and flash imprint lithography templates
Johnson, S., Resnick, D.J., Mancini, D., Nordquist, K., Dauksher, W.J., Gehoski, K., Baker, J.H., Dues, L., Hooper, A., Bailey, T.C., Sreenivasan, S.V., Ekerdt, J.G., Willson, C.G.
Published in Microelectronic engineering (01.06.2003)
Published in Microelectronic engineering (01.06.2003)
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Journal Article
Conference Proceeding
New Approaches to Nanofabrication: Molding, Printing, and Other Techniques
Gates, Byron D, Xu, Qiaobing, Stewart, Michael, Ryan, Declan, Willson, C. Grant, Whitesides, George M
Published in Chemical reviews (01.04.2005)
Published in Chemical reviews (01.04.2005)
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Journal Article
NOVEL CHEMICALLY AMPLIFIED DRY-DEVELOPING IMAGING MATERIALS FOR HIGH RESOLUTION MICROLITHOGRAPHY
Frchet, J.M.J., Fahey, J., Lee, S. M., Matuszczak, S., Shacham-Diamand, Y., MacDonald, S.A., Willson, C.G.
Published in Journal of Photopolymer Science and Technology (1992)
Published in Journal of Photopolymer Science and Technology (1992)
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Journal Article
Preparation of porous polymer membranes using nano- or micro-pillar arrays as templates
Yan, Xiaohu, Liu, Guojun, Dickey, Michael, Willson, C. Grant
Published in Polymer (Guilford) (01.11.2004)
Published in Polymer (Guilford) (01.11.2004)
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Journal Article
CHEMICALLY AMPLIFIED IMAGING MATERIALS BASED ON ACID-CATALYZED REACTIONS OF POLYESTERS OR ELECTROPHILIC CROSSLINKING PROCESSES
Fréchet, J.M.J., Kryczka, B., Matuszczak, S., Reck, B., Stanciulescu, M., Willson, C.G.
Published in Journal of Photopolymer Science and Technology (1990)
Published in Journal of Photopolymer Science and Technology (1990)
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Journal Article
Direct Measurement of the Reaction Front in Chemically Amplified Photoresists
Lin, Eric K., Soles, Christopher L., Goldfarb, Dario L., Trinque, Brian C., Burns, Sean D., Jones, Ronald L., Lenhart, Joseph L., Angelopoulos, Marie, Willson, C. Grant, Satija, Sushil K., Wu, Wen-li
Published in Science (American Association for the Advancement of Science) (19.07.2002)
Published in Science (American Association for the Advancement of Science) (19.07.2002)
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Journal Article
Improved step and flash imprint lithography templates for nanofabrication
Resnick, D.J., Mancini, D., Dauksher, W.J., Nordquist, K., Bailey, T.C., Johnson, S., Sreenivasan, S.V., Ekerdt, J.G., Willson, C.G.
Published in Microelectronic engineering (01.09.2003)
Published in Microelectronic engineering (01.09.2003)
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Journal Article
Al/Al 2O 3 film growth and laser-induced transformation
Wang, Q., Zhao, W., Lozano, J., Sun, Y.-M., Willson, C.G., White, J.M.
Published in Applied surface science (2001)
Published in Applied surface science (2001)
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Journal Article
Design of Photoresists with Reduced Environmental Impact. 1. Water-Soluble Resists Based on Photo-Cross-Linking of Poly(vinyl alcohol)
Havard, Jennifer M, Shim, Sang-Yeon, Fréchet, Jean M. J, Lin, Qinghuang, Medeiros, David R, Willson, C. Grant, Byers, Jeffrey D
Published in Chemistry of materials (01.03.1999)
Published in Chemistry of materials (01.03.1999)
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Journal Article
Al/Al2O3 film growth and laser-induced transformation
WANG, Q, ZHAO, W, LOZANO, J, SUN, Y.-M, WILLSON, C. G, WHITE, J. M
Published in Applied surface science (28.11.2001)
Published in Applied surface science (28.11.2001)
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Journal Article
Step and Flash Imprint Lithography
Bailey, T.C, Johnson, S.C, Sreenivasan, S.V, Ekerdt, J.G, Willson, C.G, Resnick, D.J
Published in Journal of photopolymer science and technology (30.05.2002)
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Published in Journal of photopolymer science and technology (30.05.2002)
Journal Article
Passive evaluation of surface and bulk ionic deposition from resist removal using surface photovoltage
Brown, S., Ackmann, P., Wenner, V., Lowell, J., Ostrout, W., Willson, C.G.
Published in Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop (1995)
Published in Proceedings of SEMI Advanced Semiconductor Manufacturing Conference and Workshop (1995)
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Conference Proceeding
Deep UV photoresists I. Meldrum's diazo sensitizer
Grant, B.D., Clecak, N.J., Twieg, R.J., Willson, C.G.
Published in IEEE transactions on electron devices (01.11.1981)
Published in IEEE transactions on electron devices (01.11.1981)
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Journal Article
Generation and relaxation of free volume during the post exposure bake
Stewart, M.D., Burns, S.D., Schmid, G.M., Willson, C.G.
Published in Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) (2000)
Published in Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387) (2000)
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Conference Proceeding