Template fabrication schemes for step and flash imprint lithography
Bailey, T.C., Resnick, D.J., Mancini, D., Nordquist, K.J., Dauksher, W.J., Ainley, E., Talin, A., Gehoski, K., Baker, J.H., Choi, B.J., Johnson, S., Colburn, M., Meissl, M., Sreenivasan, S.V., Ekerdt, J.G., Willson, C.G.
Published in Microelectronic engineering (01.07.2002)
Published in Microelectronic engineering (01.07.2002)
Get full text
Journal Article
Conference Proceeding
Role of polymer structure and ceiling temperature in polymer roughening and degradation during plasma processing: a beam system study of P4MS and PαMS
Nest, D, Chung, T-Y, Végh, J J, Graves, D B, Bruce, R L, Lin, T, Phaneuf, R J, Oehrlein, G S, Long, B K, Willson, C G
Published in Journal of physics. D, Applied physics (03.03.2010)
Published in Journal of physics. D, Applied physics (03.03.2010)
Get full text
Journal Article
Durable diamond-like carbon templates for UV nanoimprint lithography
Tao, L, Ramachandran, S, Nelson, C T, Lin, M, Overzet, L J, Goeckner, M, Lee, G, Willson, C G, Wu, W, Hu, W
Published in Nanotechnology (12.03.2008)
Published in Nanotechnology (12.03.2008)
Get full text
Journal Article
Relationship between nanoscale roughness and ion-damaged layer in argon plasma exposed polystyrene films
Bruce, R. L., Weilnboeck, F., Lin, T., Phaneuf, R. J., Oehrlein, G. S., Long, B. K., Willson, C. G., Vegh, J. J., Nest, D., Graves, D. B.
Published in Journal of applied physics (15.04.2010)
Published in Journal of applied physics (15.04.2010)
Get full text
Journal Article
Fabrication of multi-tiered structures on step and flash imprint lithography templates
Johnson, S., Resnick, D.J., Mancini, D., Nordquist, K., Dauksher, W.J., Gehoski, K., Baker, J.H., Dues, L., Hooper, A., Bailey, T.C., Sreenivasan, S.V., Ekerdt, J.G., Willson, C.G.
Published in Microelectronic engineering (01.06.2003)
Published in Microelectronic engineering (01.06.2003)
Get full text
Journal Article
Conference Proceeding
Improved step and flash imprint lithography templates for nanofabrication
Resnick, D.J., Mancini, D., Dauksher, W.J., Nordquist, K., Bailey, T.C., Johnson, S., Sreenivasan, S.V., Ekerdt, J.G., Willson, C.G.
Published in Microelectronic engineering (01.09.2003)
Published in Microelectronic engineering (01.09.2003)
Get full text
Journal Article
Preparation of oriented multilayers of poly(silane)s by the Langmuir-Blodgett technique
EMBS, F. W, WEGNER, G, NEHER, D, ALBOUY, P, MILLER, R. D, WILLSON, C. G, SCHREPP, W
Published in Macromolecules (02.09.1991)
Published in Macromolecules (02.09.1991)
Get full text
Journal Article
Advanced step and flash nanoimprint lithography using UV-sensitive hard mask underlayer material
Takei, S., Ogawa, T., Deschner, R., Hanabata, M., Willson, C.G.
Published in Micro & nano letters (01.04.2010)
Published in Micro & nano letters (01.04.2010)
Get full text
Journal Article
Measurement of thin-film dissolution kinetics using a quartz crystal microbalance
HINSBERG, W. D, WILLSON, C. G, KANAZAWA, K. K
Published in Journal of the Electrochemical Society (01.07.1986)
Published in Journal of the Electrochemical Society (01.07.1986)
Get full text
Journal Article
Preparation of porous polymer membranes using nano- or micro-pillar arrays as templates
Yan, Xiaohu, Liu, Guojun, Dickey, Michael, Willson, C. Grant
Published in Polymer (Guilford) (01.11.2004)
Published in Polymer (Guilford) (01.11.2004)
Get full text
Journal Article
Direct Measurement of the Reaction Front in Chemically Amplified Photoresists
Lin, Eric K., Soles, Christopher L., Goldfarb, Dario L., Trinque, Brian C., Burns, Sean D., Jones, Ronald L., Lenhart, Joseph L., Angelopoulos, Marie, Willson, C. Grant, Satija, Sushil K., Wu, Wen-li
Published in Science (American Association for the Advancement of Science) (19.07.2002)
Published in Science (American Association for the Advancement of Science) (19.07.2002)
Get full text
Journal Article
Alicyclic Polymers for 193 nm Resist Applications: Synthesis and Characterization
Okoroanyanwu, Uzodinma, Shimokawa, Tsutomu, Byers, Jeffrey, Willson, C. Grant
Published in Chemistry of materials (16.11.1998)
Published in Chemistry of materials (16.11.1998)
Get full text
Journal Article
The Mechanism of Phenolic Polymer Dissolution: A New Perspective
Tsiartas, Pavlos C, Flanagin, Lewis W, Henderson, Clifford L, Hinsberg, William D, Sanchez, Isaac C, Bonnecaze, Roger T, Willson, C. Grant
Published in Macromolecules (11.08.1997)
Published in Macromolecules (11.08.1997)
Get full text
Journal Article