A sub 40-nm body thickness n-type FinFET
Fried, D.M., Johnson, A.P., Nowak, E.J., Rankin, J.H., Willets, C.R.
Published in Device Research Conference. Conference Digest (Cat. No.01TH8561) (2001)
Published in Device Research Conference. Conference Digest (Cat. No.01TH8561) (2001)
Get full text
Conference Proceeding