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New amidinate complexes of indium(iii): promising CVD precursors for transparent and conductive In2O3 thin films
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Journal Article
New amidinate complexes of indium(iii): promising CVD precursors for transparent and conductive In 2 O 3 thin films
Gebhard, M, Hellwig, M, Kroll, A, Rogalla, D, Winter, M, Mallick, B, Ludwig, A, Wiesing, M, Wieck, A D, Grundmeier, G, Devi, A
Published in Dalton transactions : an international journal of inorganic chemistry (08.08.2017)
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New amidinate complexes of indium(iii): promising CVD precursors for transparent and conductive In2O3 thin filmsElectronic supplementary information (ESI) available: Temperature-dependent NMR of [In(amd)3] (3), proposed decomposition pathways under EI-MS conditions for compounds 1-3 and XPS survey spectra from In2O3 thin films deposited using 2 and 3. CCDC 1536499, 1536498 and 1536497. For ESI and crystallographic data in CIF or other electronic format see DOI: 10.1039/c7dt01280b
Gebhard, M, Hellwig, M, Kroll, A, Rogalla, D, Winter, M, Mallick, B, Ludwig, A, Wiesing, M, Wieck, A. D, Grundmeier, G, Devi, A
Year of Publication 08.08.2017
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An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursorElectronic supplementary information (ESI) available. See DOI: 10.1039/c5tc03385c
Gebhard, M, Mitschker, F, Wiesing, M, Giner, I, Torun, B, de los Arcos, T, Awakowicz, P, Grundmeier, G, Devi, A
Year of Publication 29.01.2016
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An efficient PE-ALD process for TiO sub(2) thin films employing a new Ti-precursor
Gebhard, M, Mitschker, F, Wiesing, M, Giner, I, Torun, B, de los Arcos, T, Awakowicz, P, Grundmeier, G, Devi, A
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Published in Journal of materials chemistry. C, Materials for optical and electronic devices (01.01.2016)
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Journal Article
An efficient PE-ALD process for TiO 2 thin films employing a new Ti-precursor
Gebhard, M., Mitschker, F., Wiesing, M., Giner, I., Torun, B., de los Arcos, T., Awakowicz, P., Grundmeier, G., Devi, A.
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2016)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2016)
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