Fabrication of Buried Microchannels with Almost Circular Cross-Section Using HNA Wet Etching
Yu, Qihui, Veltkamp, Henk-Willem, Wiegerink, Remco J, Lötters, Joost C
Published in Micromachines (Basel) (30.09.2024)
Published in Micromachines (Basel) (30.09.2024)
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Journal Article
Modeling, Fabrication, and Testing of a 3D-Printed Coriolis Mass Flow Sensor
Yariesbouei, Mahdieh, Sanders, Remco G P, Wiegerink, Remco J, Lötters, Joost C
Published in Sensors (Basel, Switzerland) (18.04.2023)
Published in Sensors (Basel, Switzerland) (18.04.2023)
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Journal Article
Air Damping Analysis of a Micro-Coriolis Mass Flow Sensor
Zeng, Yaxiang, Sanders, Remco, Wiegerink, Remco J, Lötters, Joost C
Published in Sensors (Basel, Switzerland) (01.01.2022)
Published in Sensors (Basel, Switzerland) (01.01.2022)
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Journal Article
Flow-Independent Thermal Conductivity and Volumetric Heat Capacity Measurement of Pure Gases and Binary Gas Mixtures Using a Single Heated Wire
Kenari, Shirin Azadi, Wiegerink, Remco J, Sanders, Remco G P, Lötters, Joost C
Published in Micromachines (Basel) (21.05.2024)
Published in Micromachines (Basel) (21.05.2024)
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Journal Article
Compact Micro-Coriolis Mass-Flow Meter with Optical Readout
Yariesbouei, Mahdieh, Sanders, Remco G P, Wiegerink, Remco J, Lötters, Joost C
Published in Micromachines (Basel) (01.01.2024)
Published in Micromachines (Basel) (01.01.2024)
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Journal Article
Thermal Flow Meter with Integrated Thermal Conductivity Sensor
Azadi Kenari, Shirin, Wiegerink, Remco J, Veltkamp, Henk-Willem, Sanders, Remco G P, Lötters, Joost C
Published in Micromachines (Basel) (21.06.2023)
Published in Micromachines (Basel) (21.06.2023)
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Journal Article
Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD
Veltkamp, Henk-Willem, Janssens, Yves L., de Boer, Meint J., Zhao, Yiyuan, Wiegerink, Remco J., Tas, Niels R., Lötters, Joost C.
Published in Micromachines (Basel) (01.11.2022)
Published in Micromachines (Basel) (01.11.2022)
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Journal Article
On Frequency-Based Interface Circuits for Capacitive MEMS Accelerometers
Qiao, Zhiliang, Boom, Boris A, Annema, Anne-Johan, Wiegerink, Remco J, Nauta, Bram
Published in Micromachines (Basel) (25.09.2018)
Published in Micromachines (Basel) (25.09.2018)
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Journal Article
Heavily-Doped Bulk Silicon Sidewall Electrodes Embedded between Free-Hanging Microfluidic Channels by Modified Surface Channel Technology
Zhao, Yiyuan, Veltkamp, Henk-Willem, Schut, Thomas V. P., Sanders, Remco G. P., Breazu, Bogdan, Groenesteijn, Jarno, de Boer, Meint J., Wiegerink, Remco J., Lötters, Joost C.
Published in Micromachines (Basel) (31.05.2020)
Published in Micromachines (Basel) (31.05.2020)
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Journal Article
Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators
Zeng, Yaxiang, Groenesteijn, Jarno, Alveringh, Dennis, Wiegerink, Remco J., Lotters, Joost C.
Published in Journal of microelectromechanical systems (01.12.2021)
Published in Journal of microelectromechanical systems (01.12.2021)
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Journal Article
Integrated Pressure Sensing Using Capacitive Coriolis Mass Flow Sensors
Alveringh, Dennis, Wiegerink, Remco J., Lotters, Joost C.
Published in Journal of microelectromechanical systems (01.06.2017)
Published in Journal of microelectromechanical systems (01.06.2017)
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Journal Article
Free Suspended Thin-Walled Nickel Electroplated Tubes for Microfluidic Density and Mass Flow Sensors
Yariesbouei, Mahdieh, Sanders, Remco G. P., Moazzenzade, Taghi, Wiegerink, Remco J., Lotters, Joost C.
Published in Journal of microelectromechanical systems (01.06.2022)
Published in Journal of microelectromechanical systems (01.06.2022)
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Journal Article
μ-Coriolis Mass Flow Sensor With Differential Capacitive Readout
Schut, Thomas V. P., Wiegerink, Remco J., Lotters, Joost C.
Published in IEEE sensors journal (01.03.2021)
Published in IEEE sensors journal (01.03.2021)
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Journal Article
Design Considerations for a Micromachined Proportional Control Valve
Groen, Maarten S., Brouwer, Dannis M., Wiegerink, Remco J., Lötters, Joost C.
Published in Micromachines (Basel) (01.06.2012)
Published in Micromachines (Basel) (01.06.2012)
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Journal Article
5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability
de Oliveira, Arthur C., Groenesteijn, Jarno, Wiegerink, Remco J., Makinwa, Kofi A. A.
Published in 2021 IEEE International Solid- State Circuits Conference (ISSCC) (13.02.2021)
Published in 2021 IEEE International Solid- State Circuits Conference (ISSCC) (13.02.2021)
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Conference Proceeding
A miniature microclimate thermal flow sensor for horticultural applications
Alveringh, Dennis, Bijsterveld, Daniel G., van den Berg, Tomas E., Veltkamp, Henk-Willem, Batenburg, Kevin. M., Sanders, Remco. G. P., Lotters, Joost C., Wiegerink, Remco J.
Published in 2022 IEEE Sensors (30.10.2022)
Published in 2022 IEEE Sensors (30.10.2022)
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Conference Proceeding