Search Results - "Wi, Seong Ju" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography

Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography

by Wi, Seong Ju, Jang, Yong Ju, Kim, Haneul, Cho, Kyeongjae, Ahn, Jinho
Published in Membranes (Basel) (26.03.2022)

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Journal Article

Study on ZrSi2 as a Candidate Material for Extreme Ultraviolet Pellicles

Study on ZrSi2 as a Candidate Material for Extreme Ultraviolet Pellicles

by Wi, Seong Ju, Kim, Won Jin, Kim, Haneul, Jeong, Dongmin, Lee, Dong Gi, Choi, Jaehyuck, Cho, Sang Jin, Yu, Lan, Ahn, Jinho
Published in Membranes (Basel) (14.08.2023)

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Journal Article

Fabrication of free-standing nanoscale SiN membranes with enhanced burst pressure via improved etching process

Fabrication of free-standing nanoscale SiN membranes with enhanced burst pressure via improved etching process

by Shin, Hyeon-Jin, Park, In-Sung, Jang, Yong Ju, Wi, Seong Ju, Lee, Gi Sung, Ahn, Jinho
Published in Sensors and actuators. A. Physical. (01.10.2019)

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Journal Article

Fabrication of free-standing nanoscale SiNx membranes with enhanced burst pressure via improved etching process

Fabrication of free-standing nanoscale SiNx membranes with enhanced burst pressure via improved etching process

by Shin, Hyeon-Jin, Park, In-Sung, Jang, Yong Ju, Wi, Seong Ju, Lee, Gi Sung, Ahn, Jinho
Published in Sensors and actuators. A. Physical. (01.10.2019)

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Journal Article

Study on ZrSi[sub.2] as a Candidate Material for Extreme Ultraviolet Pellicles

Study on ZrSi[sub.2] as a Candidate Material for Extreme Ultraviolet Pellicles

by Wi, Seong Ju, Kim, Won Jin, Kim, Haneul, Jeong, Dongmin, Lee, Dong Gi, Choi, Jaehyuck, Cho, Sang Jin, Yu, Lan, Ahn, Jinho
Published in Membranes (Basel) (01.08.2023)

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Journal Article

PELLICLE HOLDING MODULE, PELLICLE THERMAL DURABILITY EVALUATION DEVICE COMPRISING SAME, AND PELLICLE THERMAL DURABILITY EVALUATION METHOD

PELLICLE HOLDING MODULE, PELLICLE THERMAL DURABILITY EVALUATION DEVICE COMPRISING SAME, AND PELLICLE THERMAL DURABILITY EVALUATION METHOD

by WI, Seong Ju, JANG, Yong Ju, AHN, Jin Ho
Year of Publication 10.08.2023

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Patent

METHOD FOR MANUFACTURING POROUS EUV PELLICLE BY USING PROTECTIVE LAYER DEPOSITION, AND STRUCTURE USED THEREFOR

METHOD FOR MANUFACTURING POROUS EUV PELLICLE BY USING PROTECTIVE LAYER DEPOSITION, AND STRUCTURE USED THEREFOR

by WI, Seong Ju, KIM, Ha Neul, AHN, Jin Ho, KIM, Jung Yeon
Year of Publication 11.07.2024

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Patent

PELLICLE HOLDING MODULE, PELLICLE THERMAL DURABILITY EVALUATION DEVICE COMPRISING SAME, AND PELLICLE THERMAL DURABILITY EVALUATION METHOD

PELLICLE HOLDING MODULE, PELLICLE THERMAL DURABILITY EVALUATION DEVICE COMPRISING SAME, AND PELLICLE THERMAL DURABILITY EVALUATION METHOD

by WI, Seong Ju, AHN, Jinho, JANG, Yong Ju
Year of Publication 24.03.2022

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Patent

PELLICLE ETCHING JIG AND PELLICLE ETCHING SYSTEM

PELLICLE ETCHING JIG AND PELLICLE ETCHING SYSTEM

by WI, Seong Ju, AHN, Jinho, JANG, Yong Ju, SHIN, Hyeonjin
Year of Publication 09.04.2020

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Patent

Pellicle holding module pellicle thermal durability evaluation device including the same and pellicle thermal durability evaluation method

Pellicle holding module pellicle thermal durability evaluation device including the same and pellicle thermal durability evaluation method

by AHN JINHO, JANG YONG JU, WI SEONG JU
Year of Publication 11.10.2023

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Patent

Pellicle holding module pellicle thermal durability evaluation device including the same and pellicle thermal durability evaluation method

Pellicle holding module pellicle thermal durability evaluation device including the same and pellicle thermal durability evaluation method

by JANG YONG JU, JINHO AHN, WI SEONG JU
Year of Publication 24.03.2022

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Patent

EUV Method and system for improving imaging performance of masks for EUV lithography

EUV Method and system for improving imaging performance of masks for EUV lithography

by CHO MIN SUN, KIM SEON YONG, LEE DONG GI, KIM YUNSOO, AHN JINHO, JEONG DONGMIN, WI SEONG JU, SEOK JI HOO
Year of Publication 17.05.2024

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Patent

Pellicle structure with inter-mixing layer and manufacturing method therefor

Pellicle structure with inter-mixing layer and manufacturing method therefor

by JUNG HWAN KIM, JIN HO AHN, HA NEUL KIM, WI SEONG JU, WON JIN KIM, KIM CHANGSOO
Year of Publication 18.05.2023

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Patent