Impact of fabrication technology on flexural resonances of silicon nitride cantilevers
Gavan, K. Babaei, Westra, H.J.R., Van der Drift, E.W.J.M., Venstra, W.J., Van der Zant, H.S.J.
Published in Microelectronic engineering (01.04.2009)
Published in Microelectronic engineering (01.04.2009)
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