Characterization of a PECVD W sub(x)N process using N sub(2), H sub(2), and WF sub(6)
Lai, Kevin K, Mak, Alfred W, Wendling, Thomas P H F, Jian, Ping, Hathcock, Bill
Published in Thin solid films (02.11.1998)
Get full text
Published in Thin solid films (02.11.1998)
Journal Article