Applications of SOI-based optical MEMS
Noell, W., Clerc, P.-A., Dellmann, L., Guldimann, B., Herzig, H.-P., Manzardo, O., Marxer, C.R., Weible, K.J., Dandliker, R., de Rooij, N.
Published in IEEE journal of selected topics in quantum electronics (01.01.2002)
Published in IEEE journal of selected topics in quantum electronics (01.01.2002)
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Journal Article
Tunable MEMS-based optical linear (1D) diffusers for dynamic laser beam shaping and homogenizing
Masson, J., Bich, A., Noell, W., Voelkel, R., Weible, K.J., de Rooij, N.F.
Published in 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (01.08.2009)
Published in 2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics (01.08.2009)
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Conference Proceeding