Enhanced etching of silicon didioxide guided by carbon nanotubes in HF solution
Zhao, Hua-Bo (华波 赵), Ying, Alex Yi-Qun (轶群 应), Yan, Feng (峰严), Wei, Qin-Qin (芹芹 魏), Fu, Yun-Yi (云义 傅), Zhang, Yan (岩张), Li, Yan (彦李), Wei, Zi-Jun (子钧 魏), Zhang, Zhao-Hui (朝晖 张)
Published in Chinese physics B (01.10.2011)
Published in Chinese physics B (01.10.2011)
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