SSROI (super-steep retrograde on insulator) substrates for RF switch and LNA device performance enhancement
Takeuchi, Hideki, Stephenson, Robert J., Vine, Bobby, Weeks, K. Doran, Cody, Nyles W., Li, Shuyi, Connelly, Daniel, Mears, Robert J., Pfeiffer, Gerd, Aulnette, Cecile, David, Carole, Wong, Hiu-Yung
Published in 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (03.03.2024)
Published in 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (03.03.2024)
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Conference Proceeding
Orientation Dependence of Si 1-x C x :P Growth and the Impact on FinFET Structures
Tolle, John, Weeks, K. Doran, Bauer, Matthias, Machkaoutsan, Vladimir, Maes, Jan Willem, Togo, Mitsuhiro, Brus, Stephan, Hikavyy, Andriy, Loo, Roger
Published in ECS transactions (15.03.2013)
Published in ECS transactions (15.03.2013)
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Journal Article
High Efficiency Low Temperature Pre-epi Clean Method for Advanced Group IV epi Processing
Machkaoutsan, Vladimir, Weeks, K. Doran, Bauer, Matthias, Maes, Jan Willem, Tolle, John, Thomas, Shawn G., Alian, AliReza, Hikavyy, Andriy, Loo, Roger
Published in ECS transactions (15.03.2013)
Published in ECS transactions (15.03.2013)
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Journal Article
Applications of Oxygen Inserted Silicon Devices in Power and RF: (invited)
Mears, Robert J, Takeuchi, Hideki, Chen, Yi-Ann, Burton, Richard, Li, Shuyi, Stephenson, Robert J., Hytha, Marek, Cody, Nyles W., Weeks, K. Doran, Choutov, Dmitri, Connelly, Daniel, Wong, Hiu-Yung
Published in 2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (01.04.2020)
Published in 2020 4th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) (01.04.2020)
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Conference Proceeding