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"Wedershoven, Hubertus Mattheus Joseph Maria"
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Immersion lithographic apparatus
by
Berendsen, Christianus Wilhelmus Johannes
,
Riepen, Michel
,
Darhuber, Anton Alexander
,
Zeegers, Josephus Catharina Henricus
,
Wedershoven
,
Hubertus Mattheus Joseph Maria
Year of Publication
26.02.2019
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IMMERSION LITHOGRAPHIC APPARATUS
by
WEDERSHOVEN
,
HUBERTUS
,
MATTHEUS
,
JOSEPH
,
MARIA
,
RIEPEN, MICHEL
,
ZEEGERS, JOSEPHUS, CATHARINA, HENRICUS
,
DARHUBER, ANTON, ALEXANDER
,
BERENDSEN, CHRISTIANUS
Year of Publication
05.03.2015
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A METHOD OF AND A SYSTEM FOR TREATING A THIN FILM OF A COATING LIQUID
by
DARHUBER ANTON ALEXANDER
,
BERENDSEN CHRISTIANUS WILHELMUS JOHANNES
,
ZEEGERS JOSEPHUS CATHARINA HENRICUS
,
WEDERSHOVEN HUBERTUS MATTHEUS JOSEPH MARIA
Year of Publication
03.03.2015
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apparatus specially adapted therefor
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