Etch rates for micromachining processing-Part II
Williams, K.R., Gupta, K., Wasilik, M.
Published in Journal of microelectromechanical systems (01.12.2003)
Published in Journal of microelectromechanical systems (01.12.2003)
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Journal Article
Recent progress in modularly integrated MEMS technologies
Tsu-Jae King, Howe, R.T., Sedky, S., Gang Liu, Lin, B.C.-Y., Wasilik, M., Duenn, C.
Published in Digest. International Electron Devices Meeting (2002)
Published in Digest. International Electron Devices Meeting (2002)
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Conference Proceeding
Hydrogen peroxide etching and stability of p-type poly-SiGe films
Bircumshaw, B.L., Wasilik, M.L., Kim, E.B., Su, Y.R., Takeuchi, H., Low, C.W., Liu, G., Pisano, A.P., King, T.-J., Howe, R.T.
Published in 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest (2004)
Published in 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest (2004)
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Conference Proceeding