Characterizing and measuring in small boxes using XPS with multiple measurements
Pois, Heath, Lund, Parker, Singh, Saurabh, Kislitsyn, Dmitry, Warad, Laxmi, Tseng, Benny, Lee, Wei Ti, Chen, James
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Year of Publication 21.05.2024
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POIS, Heath, LEE, Wei Ti, Lund, Parker, Singh, Saurabh, WARAD, Laxmi, Kislitsyn, Dmitry, CHEN, James, Tseng, Benny
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Year of Publication 14.09.2023
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CHARACTERIZING AND MEASURING IN SMALL BOXES USING XPS WITH MULTIPLE MEASUREMENTS
POIS, Heath, TSENG, Benny, LEE, Wei Ti, SINGH, Saurabh, LUND, Parker, KISLITSYN, Dmitry, WARAD, Laxmi, CHEN, James
Year of Publication 27.04.2023
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Year of Publication 27.04.2023
Patent