Direct-write deposition with a focused electron beam
Fischer, M., Wanzenboeck, H.D., Gottsbachner, J., Müller, S., Brezna, W., Schramboeck, M., Bertagnolli, E.
Published in Microelectronic engineering (01.04.2006)
Published in Microelectronic engineering (01.04.2006)
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Journal Article
Conference Proceeding
Metal-organic chemical vapor deposition and nanoscale characterization of zirconium oxide thin films
Harasek, S, Wanzenboeck, H.D, Basnar, B, Smoliner, J, Brenner, J, Stoeri, H, Gornik, E, Bertagnolli, E
Published in Thin solid films (22.07.2002)
Published in Thin solid films (22.07.2002)
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Journal Article
Bridging the gap—Biocompatibility of microelectronic materials
Bogner, E., Dominizi, K., Hagl, P., Bertagnolli, E., Wirth, M., Gabor, F., Brezna, W., Wanzenboeck, H.D.
Published in Acta biomaterialia (01.03.2006)
Published in Acta biomaterialia (01.03.2006)
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Journal Article
[Zr(NEtMe)2(guan-NEtMe)2] as a Novel Atomic Layer Deposition Precursor: ZrO2 Film Growth and Mechanistic Studies
Blanquart, Timothee, Niinistö, Jaakko, Aslam, Nabeel, Banerjee, Manish, Tomczak, Yoann, Gavagnin, Marco, Longo, Valentino, Puukilainen, Esa, Wanzenboeck, H. D, Kessels, W. M. M, Devi, Anjana, Hoffmann-Eifert, Susanne, Ritala, Mikko, Leskelä, Markku
Published in Chemistry of materials (13.08.2013)
Published in Chemistry of materials (13.08.2013)
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Journal Article
Focused electron beam induced etching of silicon using chlorine
Roediger, P, Hochleitner, G, Bertagnolli, E, Wanzenboeck, H D, Buehler, W
Published in Nanotechnology (16.07.2010)
Published in Nanotechnology (16.07.2010)
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Journal Article
Dot-array implantation for patterned doping of semiconductors
Wanzenboeck, H.D., Ostermaier, C., Gruen, A., Eichinger, B., Karner, M., Bertagnolli, E.
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.01.2006)
Published in Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms (01.01.2006)
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Journal Article
Custom-tailored microfluidic devices and nanoscaled actuators - on the fast track
Wanzenboeck, H.D., Fischer, M., Mueller, S., Bertagnolli, E.
Published in Proceedings of IEEE Sensors, 2004 (2004)
Published in Proceedings of IEEE Sensors, 2004 (2004)
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Conference Proceeding
[Zr(NEtMe) 2 (guan-NEtMe) 2 ] as a Novel Atomic Layer Deposition Precursor: ZrO 2 Film Growth and Mechanistic Studies
Blanquart, Timothee, Niinistö, Jaakko, Aslam, Nabeel, Banerjee, Manish, Tomczak, Yoann, Gavagnin, Marco, Longo, Valentino, Puukilainen, Esa, Wanzenboeck, H. D., Kessels, W. M. M., Devi, Anjana, Hoffmann-Eifert, Susanne, Ritala, Mikko, Leskelä, Markku
Published in Chemistry of materials (13.08.2013)
Published in Chemistry of materials (13.08.2013)
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Journal Article
Topographic Effects of Microstructured Biosensors
Wanzenboeck, Heinz D., Forouzan, Sahar, Bertagnolli, Emmerich, Guell, Iris, Wirth, Michael, Gabor, Franz
Published in ECS transactions (2009)
Published in ECS transactions (2009)
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Journal Article
Surface enhanced infrared absorption (SEIRA) observed on different metal surface structures
Wanzenboeck, H. D., Weissenbacher, N., Kellner, R.
Published in AIP conference proceedings (01.06.1998)
Published in AIP conference proceedings (01.06.1998)
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Journal Article