GATE CONTACT OVER ACTIVE PROCESSES
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Year of Publication 10.09.2021
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Year of Publication 10.09.2021
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Method and apparatus for reducing particle defects in plasma etch chambers
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Year of Publication 11.09.2020
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Year of Publication 11.09.2020
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Method and apparatus for reducing particle defects in plasma etch chambers
WANG, XIKUN, HE, XIAOMING, LEE, CHANGHUN, NGUYEN, ANDREW, SHEN, MEIHUA
Year of Publication 11.09.2020
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Year of Publication 11.09.2020
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Method and apparatus for reducing particle defects in plasma etch chambers
WANG, XIKUN, HE, XIAOMING, LEE, CHANGHUN, NGUYEN, ANDREW, SHEN, MEIHUA
Year of Publication 01.09.2020
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Year of Publication 01.09.2020
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SELECTIVE ETCH FOR METAL-CONTAINING MATERIALS
WANG XIKUN, ANTHIS JEFFREY W, PARK SOONAM, INGLE NITIN K, XU LIN, KACHIAN JESSICA SEVANNE
Year of Publication 28.04.2016
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Year of Publication 28.04.2016
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PLASMA-FREE METAL ETCH
WANG, XIKUN, ANTHIS, JEFFREY W, PARK, SOONAM, KACHIAN, JESSICA SEVANNE, XU, LIN, INGLE, NITIN K
Year of Publication 21.04.2016
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Year of Publication 21.04.2016
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Selective etch for metal-containing materials
WANG XIKUN, ANTHIS JEFFREY W, PARK SOONAM, INGLE NITIN K, XU LIN, KACHIAN JESSICA SEVANNE
Year of Publication 29.03.2016
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Year of Publication 29.03.2016
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Tungsten oxide processing
KOROLIK MIKHAIL, WANG XIKUN, PARK SEUNG, LIU JIE, WANG ANCHUAN, INGLE NITIN K
Year of Publication 10.02.2015
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Year of Publication 10.02.2015
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Methods Of Etching Films With Reduced Surface Roughness
NEMANI SRINIVAS D, SCHMIEGE BENJAMIN, ANTHIS JEFFREY W, WANG XIKUN, LIU JIE, INGLE NITIN K, BENJAMINSON DAVID
Year of Publication 04.02.2016
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Year of Publication 04.02.2016
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DRY-ETCH FOR SELECTIVE TUNGSTEN REMOVAL
WANG, XIKUN, WANG, ANCHUAN, LI, ZIHUI, INGLE, NITIN K, HSU, CHING-MEI
Year of Publication 24.07.2014
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Year of Publication 24.07.2014
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Method and apparatus for reducing particle defects in plasma etch chambers
WANG, XIKUN, HE, XIAOMING, LEE, CHANGHUN, NGUYEN, ANDREW, SHEN, MEIHUA
Year of Publication 16.10.2019
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Year of Publication 16.10.2019
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SELECTIVE ETCH FOR METAL-CONTAINING MATERIALS
WANG XIKUN, ANTHIS JEFFREY W, PARK SOONAM, INGLE NITIN K, XU LIN, KACHIAN JESSICA SEVANNE
Year of Publication 14.05.2015
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Year of Publication 14.05.2015
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