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Year of Publication 01.11.2022
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Semiconductor device fabrication processes and semiconductor structures
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A method for creating a fully self-aligned via
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Year of Publication 21.07.2023
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Year of Publication 21.07.2023
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Selective etch for metal-containing materials
Anthis Jeffrey W, Xu Lin, Ingle Nitin K, Kachian Jessica Sevanne, Park Soonam, Wang Xikun
Year of Publication 18.07.2017
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Year of Publication 18.07.2017
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Methods of Etching Films with Reduced Surface Roughness
Ingle, Nitin K, Wang, Xikun, Schmiege, Benjamin, Benjaminson, David, Nemani, Srinivas D, Anthis, Jeffrey W, Liu, Jie
Year of Publication 12.07.2018
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Year of Publication 12.07.2018
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