Gap-fill depositions in the formation of silicon containing dielectric materials
BANG WON B, WANG YEN-KUN V, BANTHIA VIKASH, XIA XINYUN, INGLE NITIN K, YUAN ZHENG, WONG SHAN
Year of Publication 25.11.2008
Get full text
Year of Publication 25.11.2008
Patent
Gap-fill depositions in the formation of silicon containing dielectric materials
Ingle, Nitin K, Wong, Shan, Xia, Xinyun, Banthia, Vikash, Bang, Won B, Wang, Yen-Kun V, Yuan, Zheng
Year of Publication 25.11.2008
Get full text
Year of Publication 25.11.2008
Patent
Lift pin assembly for substrate processing
BANG WON B, WANG YEN-KUN V, OH JANG SEOK, HERKALO DANIEL S, LEE DONG HYUNG, TRAN TOAN Q, LEE JIN HO
Year of Publication 17.04.2007
Get full text
Year of Publication 17.04.2007
Patent
Lift pin assembly for substrate processing
Tran, Toan Q, Herkalo, Daniel S, Wang, Yen-Kun V, Lee, Jin Ho, Lee, Dong Hyung, Oh, Jang Seok, Bang, Won B
Year of Publication 17.04.2007
Get full text
Year of Publication 17.04.2007
Patent
Gap-fill depositions in the formation of silicon containing dielectric materials
BANG WON B, WANG YEN-KUN V, BANTHIA VIKASH, XIA XINYUN, INGLE NITIN K, YUAN ZHENG, WONG SHAN
Year of Publication 30.06.2005
Get full text
Year of Publication 30.06.2005
Patent
Lift pin assembly for substrate processing
BANG WON B, WANG YEN-KUN V, OH JANG SEOK, HERKALO DANIEL S, LEE DONG HYUNG, TRAN TOAN Q, LEE JIN HO
Year of Publication 04.11.2004
Get full text
Year of Publication 04.11.2004
Patent