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Published in Journal of electron microscopy (01.12.2006)
Published in Journal of electron microscopy (01.12.2006)
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Journal Article
Optic apparatus, micro-electromechanical component and manufacture method thereof
CHUANG, YUN JU, CHEN, FU RONG, CHEN, YI MING, WANG, WAN JHIH, HUANG, SEN HUI, KAI, JI JUNG, HUANG, WEI TSUNG, TSENG, FANG GANG
Year of Publication 01.09.2009
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Year of Publication 01.09.2009
Patent
Optic apparatus, micro-electromechanical component and manufacture method thereof
HUANG, SEN-HUI, CHUANG, YUN-JU, CHEN, FU-RONG, WANG, WAN JHIH, HUANG, WEI-TSUNG, KAI, JI JUNG, CHEN, YI-MING, TSENG, FANG GANG
Year of Publication 16.11.2007
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Year of Publication 16.11.2007
Patent