Search Results - "Wang, Song-Ho" :: K.UTB vyhledávací portál

Large-scale data analysis of PECVD amorphous silicon interface passivation layer via the optical emission spectra for parameterized PCA

by Huang, Hung-Jui, Kau, Li-Han, Wang, Ho-Song, Hsieh, Yu-Lin, Lee, Chien-Chieh, Fuh, Yiin-Kuen, Li, Tomi T.
Published in International journal of advanced manufacturing technology (01.03.2019)

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Evolution of a-Si:H to nc-Si:H transition of hydrogenated silicon films deposited by trichlorosilane using principle component analysis of optical emission spectroscopy

by Wang, Song-Ho, Chang, Hsueh-Er, Lee, Chien-Chieh, Fuh, Yiin-Kuen, Li, Tomi T.
Published in Materials chemistry and physics (15.01.2020)

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Optimization on Deposition of Aluminum Nitride by Pulsed Direct Current Reactive Magnetron Sputtering

by Yang, Yu-Pu, Lu, Te-Yun, Wang, Song-Ho, Chang, Hsueh-Er, Wang, Peter j., Lai, Walter, Fuh, Yiin-Kuen, Li, Tomi T.
Published in 2020 China Semiconductor Technology International Conference (CSTIC) (26.06.2020)

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Plasma Process Optimization of Silicon Film Deposition from Trichlorosiliane Precursor with OES Monitoring

by Lee, Chien-Chieh, Wang, Song-Ho, Chang, Hsueh-Er, Fuh, Yiin-Kuen, Li, Tomi T., Chiou, Ya-Hui, Cheng, Hsin-Chuan
Published in 2019 China Semiconductor Technology International Conference (CSTIC) (01.03.2019)

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Machine Learning Assisted In-Situ Sensing and Detection on System of PECVD Depositing Hydrogenated Silicon Films

by Yang, Yu-Pu, Lo, Hsiao-Han, Chen, Wei-Lun, Wang, Song-Ho, Lu, Te-Yun, Chang, Hsueh-Er, Wang, Peter J., Lai, Walter, Fuh, Yiin-Kuen, Li, Tomi T.
Published in 2021 China Semiconductor Technology International Conference (CSTIC) (14.03.2021)

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Conference Proceeding