Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension
Sun, Boqian, Wang, Shunyue, Li, Haixia, He, Xiaoxia
Published in Sensors (Basel, Switzerland) (20.10.2016)
Published in Sensors (Basel, Switzerland) (20.10.2016)
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Journal Article
Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope
Sun, Boqian, Wang, Shunyue, Tan, Yidong, Liu, Yunfeng, Han, Fengtian
Published in Sensors (Basel, Switzerland) (12.11.2018)
Published in Sensors (Basel, Switzerland) (12.11.2018)
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Journal Article
Squeeze-Film Air Damping of a Five-Axis Electrostatic Bearing for Rotary Micromotors
Wang, Shunyue, Han, Fengtian, Sun, Boqian, Li, Haixia
Published in Sensors (Basel, Switzerland) (13.05.2017)
Published in Sensors (Basel, Switzerland) (13.05.2017)
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Journal Article
High-Yield Triple-Stack Bonding Fabrication Process For Micromachined Micromotors With Contactless Rotor
Sun, Boqian, Wang, Shunyue, Tan, Yidong, Han, Fengtian
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
Published in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) (01.06.2019)
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Conference Proceeding