A Reliability Enhanced 5nm CMOS Technology Featuring 5th Generation FinFET with Fully-Developed EUV and High Mobility Channel for Mobile SoC and High Performance Computing Application
Liu, J.C., Mukhopadhyay, S., Kundu, Amit, Chen, S.H., Wang, H.C., Huang, D.S., Lee, J.H., Wang, M.I., Lu, Ryan, Lin, S.S., Chen, Y.M., Shang, H.L., Wang, P.W., Lin, H.C., Yeap, Geoffrey, He, Jun
Published in 2020 IEEE International Electron Devices Meeting (IEDM) (12.12.2020)
Published in 2020 IEEE International Electron Devices Meeting (IEDM) (12.12.2020)
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