Poisson's Ratio of Low-Temperature PECVD Silicon Nitride Thin Films
Walmsley, B.A., Yinong Liu, Xiao Zhi Hu, Bush, M.B., Dell, J.M., Faraone, L.
Published in Journal of microelectromechanical systems (01.06.2007)
Published in Journal of microelectromechanical systems (01.06.2007)
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Journal Article
Design and optimisation of a MEMS-based tunable Fabry-Pérot infrared filter
Walmsley, B.A., Dell, J.M., Yinong Liu, Xiao Zhi Hu, Bush, M.B., Faraone, L.
Published in 2006 Conference on Optoelectronic and Microelectronic Materials and Devices (01.12.2006)
Published in 2006 Conference on Optoelectronic and Microelectronic Materials and Devices (01.12.2006)
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Conference Proceeding