Plasma-Enhanced Atomic Layer Deposition of SiN–AlN Composites for Ultra Low Wet Etch Rates in Hydrofluoric Acid
Kim, Yongmin, Provine, J, Walch, Stephen P, Park, Joonsuk, Phuthong, Witchukorn, Dadlani, Anup L, Kim, Hyo-Jin, Schindler, Peter, Kim, Kihyun, Prinz, Fritz B
Published in ACS applied materials & interfaces (13.07.2016)
Published in ACS applied materials & interfaces (13.07.2016)
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Journal Article
Self-limiting atomic layer deposition of barium oxide and barium titanate thin films using a novel pyrrole based precursor
Acharya, Shinjita, Torgersen, Jan, Kim, Yongmin, Park, Joonsuk, Schindler, Peter, Dadlani, Anup L., Winterkorn, Martin, Xu, Shicheng, Walch, Stephen P., Usui, Takane, Schildknecht, Christian, Prinz, Fritz B.
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (01.01.2016)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (01.01.2016)
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Thermal Decomposition Pathways and Rates for Silane, Chlorosilane, Dichlorosilane, and Trichlorosilane
Walch, Stephen P, Dateo, Christopher E
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (15.03.2001)
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (15.03.2001)
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Semiconductor device and manufacturing method of the same
KIM, KI HYUN, LEE, YOUNG DONG, PROVINE JOHN, KIM, HYO JIN, SCHINDLER PETER, KANG JINSUNG, PRINZ FRIEDRICH B, WALCH STEPHEN P, KIM, YONG MIN
Year of Publication 07.02.2018
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Year of Publication 07.02.2018
Patent
On the reaction CH2O+NH3→CH2NH+H2O
Walch, Stephen P, Bauschlicher, Charles W, Ricca, Alessandra, Bakes, E.L.O
Published in Chemical physics letters (05.01.2001)
Published in Chemical physics letters (05.01.2001)
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Journal Article
Theoretical studies of diamond mechanosynthesis reactions
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Journal Article
Conference Proceeding
Electronic Quenching of OH A 2Σ+ (v‘ = 0, 1) in Complexes with Hydrogen and Nitrogen
Lester, Marsha I, Loomis, Richard A, Schwartz, Rebecca L, Walch, Stephen P
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (04.12.1997)
Published in The journal of physical chemistry. A, Molecules, spectroscopy, kinetics, environment, & general theory (04.12.1997)
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