Room temperature deposition of crystalline HfN thin films by DC reactive magnetron sputtering
Phae-ngam, Wuttichai, Lertvanithphol, Tossaporn, Chananonnawathorn, Chanunthorn, Kowong, Rattanachai, Horprathum, Mati, Meksuk, Sainampeung, Waikhamnuan, Nat, Thonglem, Sutatip
Published in Materials today : proceedings (2021)
Published in Materials today : proceedings (2021)
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