Design of a low-cost MEMS monolithically-integrated relative humidity sensor
Cicek, P.-V, Saha, T, Waguih, B, Nabki, F, El-Gamal, M N
Published in 2010 International Conference on Microelectronics (01.12.2010)
Published in 2010 International Conference on Microelectronics (01.12.2010)
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