Phonon Dominated Heat Conduction Normal to Mo/Si Multilayers with Period below 10 nm
Li, Zijian, Tan, Si, Bozorg-Grayeli, Elah, Kodama, Takashi, Asheghi, Mehdi, Delgado, Gil, Panzer, Matthew, Pokrovsky, Alexander, Wack, Daniel, Goodson, Kenneth E
Published in Nano letters (13.06.2012)
Published in Nano letters (13.06.2012)
Get full text
Journal Article
비원형 퓨필을 가진 검사 시스템
KVAMME DAMON, JO SSEUNHYEUN JOSHUA, YE XIN ROLI, WACK DANIEL, SHI RUI FANG
Year of Publication 01.09.2021
Get full text
Year of Publication 01.09.2021
Patent
다색 연엑스선 회절에 기초한 반도체 계측을 위한 방법 및 시스템
SHCHEGROV ANDREI, KUZNETSOV ALEXANDER, ARTEMIEV NIKOLAY, WACK DANIEL, FRIEDMANN MICHAEL, KHODYKIN OLEG
Year of Publication 20.02.2020
Get full text
Year of Publication 20.02.2020
Patent
EUV APPARATUS FOR EUV IMAGING AND METHODS OF USING SAME
WACK DANIEL C, MCGUIRE JAMES P. JR, KVAMME DAMON F, RODGERS JOHN M, ROGERS JOHN R
Year of Publication 15.03.2018
Get full text
Year of Publication 15.03.2018
Patent
SYSTEM AND METHOD FOR GENERATION OF EXTREME ULTRAVIOLET LIGHT
TSIGUTKIN KONSTANTIN, WALSH JOSEPH, WACK DANIEL, CHILESE FRANK, BYKANOV ALEXANDER, KHODYKIN OLEG, HALE LAYTON
Year of Publication 30.03.2016
Get full text
Year of Publication 30.03.2016
Patent
APPARATUS FOR EUV IMAGING AND METHODS OF USING SAME
WACK DANIEL C, MCGUIRE JAMES P. JR, KVAMME DAMON F, RODGERS JOHN M, ROGERS JOHN R
Year of Publication 07.04.2014
Get full text
Year of Publication 07.04.2014
Patent