DEPOSITION APPARATUS AND PHYSICAL VAPOR DEPOSITION CHAMBER
ZHANG, Jun, ZHAO, Jinrong, XU, Baogang, WANG, Jun, WU, Xuewei, WANG, Tong, GUO, Bingliang, ZHANG, Henan, LIU, Shaohui, DONG, Boyu
Year of Publication 04.11.2022
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Year of Publication 04.11.2022
Patent