Multi-mode thin film deposition apparatus and method of depositing a thin film
LIN KUNGLIANG, LIN KUANYU, CHEN CHIENCHIH, WU SHIEHSIEN, TUNG FUCHING, CHEN CHIHYUNG, CHANG CHIAHAO, LIN SHIHCHIN
Year of Publication 03.06.2015
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Year of Publication 03.06.2015
Patent