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Year of Publication 15.06.2022
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REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
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Year of Publication 23.06.2021
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REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
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Year of Publication 17.12.2020
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REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
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Year of Publication 28.08.2020
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EDGE RING SYSTEMS FOR SUBSTRATE PROCESSING SYSTEMS
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Year of Publication 11.02.2021
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Year of Publication 11.02.2021
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REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES
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Year of Publication 20.02.2020
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Replaceable and/or collapsible edge ring assembly incorporating edge ring positioning and centering functionality for plasma sheath adjustment
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Year of Publication 26.07.2024
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Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features and systems using the same
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Year of Publication 16.05.2024
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Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features and systems using the same
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Year of Publication 21.01.2024
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Edge ring system for substrate processing system
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Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering features and systems using the same
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REPLACEABLE AND/OR COLLAPSIBLE EDGE RING ASSEMBLIES FOR PLASMA SHEATH TUNING INCORPORATING EDGE RING POSITIONING AND CENTERING FEATURES AND SYSTEMS USING THE SAME
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Year of Publication 01.03.2021
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