Methods and systems of transferring, docking and processing substrates
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 05.02.2013
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Year of Publication 05.02.2013
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Methods and systems of transferring, docking and processing substrates
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 18.09.2012
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Year of Publication 18.09.2012
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Methods and systems of transferring a substrate to minimize heat loss
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Year of Publication 07.02.2012
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Year of Publication 07.02.2012
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Integrated facility and process chamber for substrate processing
ROSE RONALD L, PARK KON, LIU REX, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 01.07.2010
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Year of Publication 01.07.2010
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Methods and Systems of Transferring, Docking and Processing Substrates
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 08.09.2011
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Year of Publication 08.09.2011
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Methods and Systems of Transferring, Docking and Processing Substrates
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 23.06.2011
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Year of Publication 23.06.2011
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Methods and systems of transferring, docking and processing substrates
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 01.03.2011
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Year of Publication 01.03.2011
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Methods and systems of transferring a substrate to minimize heat loss
PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 08.07.2010
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Year of Publication 08.07.2010
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Methods and systems of transferring, docking and processing substrates
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 01.07.2010
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Year of Publication 01.07.2010
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METHODS AND SYSTEMS OF TRANSFERRING, DOCKING AND PROCESSING SUBSTRATES
LIU, REX, ZHU, SIMON, SHIN, GENE, MAK, ALFRED, WU, TZYUNG, TERRY, ROSE, RONALD, L, WANG, XIAOMING, PARK, KON, PAK, SAMUEL, S, LOH, YING TSONG, LEI, LAWRENCE, CHUNG-LAI
Year of Publication 04.11.2010
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Year of Publication 04.11.2010
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METHODS AND SYSTEMS OF TRANSFERRING, DOCKING AND PROCESSING SUBSTRATES
LIU, REX, ZHU, SIMON, SHIN, GENE, MAK, ALFRED, WU, TZYUNG, TERRY, ROSE, RONALD, L, WANG, XIAOMING, PARK, KON, PAK, SAMUEL, S, LOH, YING TSONG, LEI, LAWRENCE, CHUNG-LAI
Year of Publication 08.07.2010
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Year of Publication 08.07.2010
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Systems and methods for substrate processing
PARK KON, LOH YING TSONG, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, ROSE ROLAND L, WU TZYUNG TERRY
Year of Publication 01.07.2010
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Year of Publication 01.07.2010
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Process module facility
LIU, REX, MAK, ALFRED, PARK, KON, RON, ROSE, WU, TZYUNG TERRY, LEI, LAWRENCE CHUNG-LAI
Year of Publication 01.05.2014
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Year of Publication 01.05.2014
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Method for transferring one or more substrates between process modules or load lock stations
LIU, REX, ZHU, SIMON, SHIN, GENE, MAK, ALFRED, WANG, XIAOMING, PARK, KON, WU, TZYUNG TERRY, LEI, LAWRENCE CHUNG-LAI
Year of Publication 11.11.2013
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Year of Publication 11.11.2013
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Process module facility
ROSE RONALD L, PARK KON, LIU REX, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 18.07.2012
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Year of Publication 18.07.2012
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Method for transferring substrate to two or more process modules
LIU, REX, ZHU, SIMON, SHIN, GENE, MAK, ALFRED, WANG, XIAOMING, PARK, KON, RON, ROSE, WU, TZYUNG TERRY, LEI, LAWRENCE CHUNG-LAI, PAK, SANGSUN (SAM)
Year of Publication 11.07.2013
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Year of Publication 11.07.2013
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Method for transferring a substrate to two or more process modules
ROSE RONALD L, PARK KON, ZHU SIMON, SHIN GENE, WANG XIAOMING, LIU REX, PAK SAMUEL S, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 27.02.2013
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Year of Publication 27.02.2013
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Process module facility
LIU, REX, MAK, ALFRED, PARK, KON, RON, ROSE, WU, TZYUNG TERRY, LEI, LAWRENCE CHUNG-LAI
Year of Publication 16.12.2010
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Year of Publication 16.12.2010
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Process module facility
ROSE RONALD L, PARK KON, LIU REX, LEI LAWRENCE CHUNG-LAI, MAK ALFRED, WU TZYUNG TERRY
Year of Publication 07.07.2010
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Year of Publication 07.07.2010
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Method for transferring substrate to two or more process modules
LIU, REX, ZHU, SIMON, SHIN, GENE, MAK, ALFRED, WANG, XIAOMING, PARK, KON, RON, ROSE, WU, TZYUNG TERRY, LEI, LAWRENCE CHUNG-LAI, PAK, SANGSUN (SAM)
Year of Publication 01.08.2010
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Year of Publication 01.08.2010
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